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Books in Physical sciences and engineering

  • Plasma Processing for VLSI

    • 1st Edition
    • Volume 8
    • December 1, 2014
    • Norman G. Einspruch + 1 more
    • English
    VLSI Electronics: Microstructure Science, Volume 8: Plasma Processing for VLSI (Very Large Scale Integration) discusses the utilization of plasmas for general semiconductor processing. It also includes expositions on advanced deposition of materials for metallization, lithographic methods that use plasmas as exposure sources and for multiple resist patterning, and device structures made possible by anisotropic etching. This volume is divided into four sections. It begins with the history of plasma processing, a discussion of some of the early developments and trends for VLSI. The second section, Deposition, discusses deposition techniques for VLSI such as sputtering metals for metallization and contacts, plasma-enhanced chemical vapor deposition of metals and suicides, and plasma enhanced chemical vapor deposition of dielectrics. The part on Lithography presents the high-resolution trilayer resist system, pulsed x-ray sources for submicrometer x-ray lithography, and high-intensity deep-UV sources. The last part, Etching, provides methods in etching, like ion-beam etching using reactive gases, low-pressure reactive ion etching, and the uses of inert-gas ion milling. The theory and mechanisms of plasma etching are described and a number of new device structures made possible by anisotropic etching are enumerated as well. Scientists, engineers, researchers, device designers, and systems architects will find the book useful.

  • Advances in Cell Culture

    • 1st Edition
    • Volume 4
    • December 1, 2014
    • Karl Maramorosch
    • English
    Advances in Cell Culture, Volume 4 is a compilation of research papers in the field of cell culture. The contributions reflect the thinking and accomplishments of those who are in the forefront of the broad field of cell culture. This volume contains chapters that are devoted to basic aspects such as cell shape and growth control in vitro, morphological and cytochemical changes occurring during muscle culture of human myopathies, and the biology of cultured human colon tumor cells. The structure and application of microcarriers and hybridoma technology; the establishment of cell lines from human solid tumors; the use of invertebrate organ culture for the study of spermiogenesis; and the study of mycotoxin action on invertebrate cells are presented as well. Also included is a biographical sketch of George Gey, who had a profound impact on cell culture. Cell biologists and researchers who use in vitro techniques will find the book highly informative and insightful.

  • Metal – Semiconductor Contacts and Devices

    • 1st Edition
    • Volume 13
    • December 1, 2014
    • Simon S. Cohen + 1 more
    • Norman G. Einspruch
    • English
    VLSI Electronics Microstructure Science, Volume 13: Metal-Semiconductor Contacts and Devices presents the physics, technology, and applications of metal-semiconductor barriers in digital integrated circuits. The emphasis is placed on the interplay among the theory, processing, and characterization techniques in the development of practical metal-semiconductor contacts and devices. This volume contains chapters that are devoted to the discussion of the physics of metal-semiconductor interfaces and its basic phenomena; fabrication procedures; and interface characterization techniques, particularly, ohmic contacts. Contacts that involve polycrystalline silicon; applications of the metal-semiconductor barriers in MOS, bipolar, and MESFET digital integrated circuits; and methods for measuring the barrier height are covered as well. Process engineers, device physicists, circuit designers, and students of this discipline will find the book very useful.

  • VLSI Metallization

    • 1st Edition
    • Volume 15
    • December 1, 2014
    • Norman G. Einspruch + 2 more
    • English
    VLSI Electronics Microstructure Science, Volume 15: VLSI Metallization discusses the various issues and problems related to VLSI metallization. It details the available solutions and presents emerging trends. This volume is comprised of 10 chapters. The two introductory chapters, Chapter 1 and 2 serve as general references for the electrical and metallurgical properties of thin conducting films. Subsequent chapters review the various aspects of VLSI metallization. The order of presentation has been chosen to follow the common processing sequence. In Chapter 3, some relevant metal deposition techniques are discussed. Chapter 4 presents the methods of VLSI lithography and etching. Conducting films are first deposited at the gate definition step; therefore, the issues related to gate metallization are discussed next in Chapter 5.In Chapter 6, contact metallization is elaborated, and Chapter 7 is devoted to multilevel metallization schemes. Long-time reliability is the subject of Chapter 8, which discusses the issues of contact and interconnect electromigration. GaAs metallization is tackled in Chapter 9. The volume concludes with a general discussion of the functions of interconnect systems in VLSI. Materials scientists, processing and design engineers, and device physicists will find the book very useful.

  • Advances in Control Systems

    Theory and Applications
    • 1st Edition
    • Volume 5
    • December 1, 2014
    • C. T. Leondes
    • English
    Advances in Control Systems: Theory and Applications, Volume 5 provides information pertinent to the significant progress in the field of control and systems theory and applications. This book presents the problem of the optimal control of a system. Organized into six chapters, this volume begins with an overview of the fundamental conditions in the calculus of variations that are basic to the optimal control problem. This text then examines one of the basic problems in control and systems theory in general. Other chapters consider a number of rather basic results in optimal nonlinear filtering and describe the characteristic function of the state of vector of a nonlinear system. This book discusses as well a significant application area of control and systems theory, which is the optimal control of nuclear reactors. The final chapter deals with optimal control with bounds on the state variables. This book is a valuable resource for practicing engineers.

  • Advances in Software Science and Technology

    • 1st Edition
    • December 1, 2014
    • Hiroyasu Kakuda + 2 more
    • English
    Advances in Software Science and Technology, Volume 3 provides information pertinent to the advancement of the science and technology of computer software. This book discusses the various applications for computer systems. Organized into two parts encompassing 11 chapters, this volume begins with an overview of the development of a system of writing tools called SUIKOU that analyzes a machine-readable Japanese document textually. This text then presents the conditioned attribute grammars (CAGs) and a system for evaluating them that can be applied to natural-language processing. Other chapters consider an object-oriented implementation of TCP/IP network protocols, which are based on a connection-oriented implementation model. This book discusses as well the grammar and semantics of RACCO and explains its formal semantics and implementation. The final chapter deals with the rules for submission of English papers that will be published, which includes papers that are reports of academic research by members of the Society. This book is a valuable resource for scientists and research workers.

  • Materials and Process Characterization

    • 1st Edition
    • Volume 6
    • December 1, 2014
    • Norman G. Einspruch + 1 more
    • English
    VLSI Electronics: Microstructure Science, Volume 6: Materials and Process Characterization addresses the problem of how to apply a broad range of sophisticated materials characterization tools to materials and processes used for development and production of very large scale integration (VLSI) electronics. This book discusses the various characterization techniques, such as Auger spectroscopy, secondary ion mass spectroscopy, X-ray topography, transmission electron microscopy, and spreading resistance. The systematic approach to the technologies of VLSI electronic materials and device manufacture are also considered. This volume is beneficial to materials scientists, chemists, and engineers who are commissioned with the responsibility of developing and implementing the production of materials and devices to support the VLSI era.

  • Advances in Software Science and Technology

    • 1st Edition
    • December 1, 2014
    • Teruo Hikita + 2 more
    • English
    Advances in Software Science and Technology, Volume 4 provides information pertinent to the advancement of the science and technology of computer software. This book discusses the various applications for computer systems. Organized into two parts encompassing 10 chapters, this volume begins with an overview of the historical survey of programming languages for vector/parallel computers in Japan and describes compiling methods for supercomputers in Japan. This text then explains the model of a Japanese software factory, which is presented by the logical configuration that has been satisfied by the semantics of software engineering. Other chapters consider fluent joint as an algorithm that operates on relations organized as multidimensional linear hash files. The final chapter deals with the rules for submission of English papers that will be published, which includes papers that are reports of academic research by members of the Society. This book is a valuable resource for scientists, software engineers, and research workers.

  • Geomorphological Fieldwork

    • 1st Edition
    • Volume 18
    • December 1, 2014
    • English
    Geomorphological Fieldwork addresses a topic that always remains popular within the geosciences and environmental science. More specifically, the volume conveys a growing legacy of field-based learning for young geomorphologists that can be used as a student book for field-based university courses and postgraduate research requiring fieldwork or field schools. The editors have much experience of field-based learning within geomorphology and extend this to physical geography. The topics covered are relevant to basic geomorphology as well as applied approaches in environmental and cultural geomorphology. The book integrates a physical-human approach to geography, but focuses on physical geography and geomorphology from an integrated field-based geoscience perspective.

  • Advances in Cell Culture

    • 1st Edition
    • Volume 3
    • December 1, 2014
    • Karl Maramorosch
    • English
    Advances in Cell Culture, Volume 3 is a compilation of articles in the field of cell culture. The chapters in the book are prepared by recognized authorities in their specialized fields. The text deals with all the aspects of cell culture, which includes the growth of individual cells or cell populations, the growth of small fragments of explanted tissue, the growth of organs, and the growth of obligate parasites in cell culture systems. This volume provides reviews of important aspects of in vitro cultivation and presents the increasing understanding of the wide ramifications of in vitro techniques. The book also focuses on specific topics in cell culture such as protoplasts and plant viruses; applications of flow cytometry to tissue culture systems; plant tissue culture systems for screening of plant growth regulators; growth factors and hemopoietic cell differentiation; and mosquito cell culture. A chapter is also devoted to a biographical sketch of Philip R. White, remembered for his pioneering plant tissue culture work and his contributions to animal cell culture and to in vitro research as a whole. Cell biologists and researchers who use in vitro techniques will find the book highly informative and insightful.

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