Skip to main content

Handbook of Thin Film Deposition

  • 3rd Edition - June 27, 2012
  • Editor: Krishna Seshan
  • Language: English
  • Hardback ISBN:
    9 7 8 - 1 - 4 3 7 7 - 7 8 7 3 - 1
  • eBook ISBN:
    9 7 8 - 1 - 4 3 7 7 - 7 8 7 4 - 8

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related a… Read more

Handbook of Thin Film Deposition

Purchase options

Limited Offer

Save 50% on book bundles

Immediately download your ebook while waiting for your print delivery. No promo code is needed.

Book bundle cover eBook and print

Institutional subscription on ScienceDirect

Request a sales quote

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes.  In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films.