Handbook of Sputter Deposition Technology
Principles, Technology and Applications
- 1st Edition - December 31, 1992
- Authors: Kiyotaka Wasa, Shigeru Hayakawa
- Language: English
A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microel… Read more
Purchase options
A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade.
Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
Electronics and materials engineers in the automotive, medical, semiconductors, space, plastics, and military industries.
Thin Film Materials and Devices
Thin Film Processes
Sputtering Phenomena
Sputtering Systems
Deposition of Compound Thin Films
Microfabrication by Sputtering
Future Directions
Thin Film Processes
Sputtering Phenomena
Sputtering Systems
Deposition of Compound Thin Films
Microfabrication by Sputtering
Future Directions
"àcomprehensively covers state-of-the-art sputtering techniques and equipmentàthoroughly addresses all fundamental aspects." —Materials and Processing Report
- Edition: 1
- Published: December 31, 1992
- Language: English
KW
Kiyotaka Wasa
Affiliations and expertise
Matsushita Electric, Ltd. and Yokohama City University, Japan