Total Pressure Measurements in Vacuum Technology
- 1st Edition - September 23, 2014
- Latest edition
- Author: A. Berman
- Language: English
- Paperback ISBN:9 7 8 - 1 - 4 8 3 2 - 3 6 1 0 - 0
- eBook ISBN:9 7 8 - 1 - 4 8 3 2 - 7 3 7 9 - 2
Total Pressure Measurements in Vacuum Technology focuses on the measurement of low total pressure in hostile environments or in the presence of magnetic fields. This book… Read more
Total Pressure Measurements in Vacuum Technology focuses on the measurement of low total pressure in hostile environments or in the presence of magnetic fields. This book emphasizes the general processes and problems involved in measurement techniques and physical principles on which vacuum gauges operate, rather than on the detailed description of the gauges. The design and techniques involved in the use of special instruments that determine “pressure” or gas density, such as pressure converters or radioactive gauges, are also described. This publication is mainly intended for graduate students and research scientists who have a good general background in physics and engineering.
Preface
Acknowledgments
List of Symbols
Chapter 1. Units and Terminology in Vacuum Technology
1.1 Pressure Units in Different Systems
1.2 The Logarithmic Representation of Pressure
1.3 Throughput and Conductance in the SI System
1.4 Terminology and Standardization in Vacuum Technology
References
Chapter 2. Basic Concepts of Pressure Measurement
2.1 The Rarefied Environment
2.2 The Pressure Concept
2.3 Influence of the Rarefied Environment on the Measuring Process
2.4 Methods of Pressure Measurement
2.5 The Process of Pressure Measurement
References
Chapter 3. Pressure Standards
3.1 Classification of Pressure Standards
3.2 Precision Liquid-Column Manometers
3.3 The Compression Manometer—McLeod Gauge
3.4 Pressure Generators
3.5 Accuracy of Primary Standards
3.6 The Conventional Triode
3.7 The Capacitance Manometer
3.8 The Spinning-Rotor Viscosity Gauge
References
Chapter 4. Gauges for Low-Pressure Measurement
4.1 Classes of Instruments
4.2 Gauges Measuring the Force Effect of Gas
4.3 Gauges Measuring Gas Kinetic Effects
4.4 Gauges Measuring Phenomena Produced by Charged Particles Crossing the Gas
4.5 The Brownian Motion Gauge
4.6 Range of Pressures Covered by Vacuum Gauges
References
Chapter 5. Methods for Vacuum Gauge Calibration
5.1 General Considerations
5.2 The Main Components of a Calibration System
5.3 General Procedures for Calibration
5.4 The Static Method
5.5 The Dynamic Method
5.6 Other Methods for Calibration in Ultrahigh Vacuum
5.7 The Measurement of Gas Throughput
5.8 The Measurement of Conductance to Free Molecular Flow
5.9 Dissociation Equilibrium Pressure Method
References
Chapter 6. Calibration of Vacuum Gauges for Different Gases
6.1 Calibration Techniques
6.2 Calibration with Water Vapor
6.3 Calibration with Hydrogen Isotopes
6.4 Calibration with Reactive Gases
References
Chapter 7. Performance Determination of Hot-Cathode Ionization Gauges
7.1 Characteristics Defining Performance
7.2 Determination of Pressure Linearity with Time
7.3 Sensitivity Determination
7.4 Determination of Residual Currents
7.5 Pumping Speed and Gas Release Determination
References
Chapter 8. Pressure Measurement in Confined Environments
8.1 Physical Principles
8.2 Continuously Pumped Vessels
8.3 Sealed-off Vessels
References
Index
- Edition: 1
- Latest edition
- Published: September 23, 2014
- Language: English
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