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Thin Film Processes

1st Edition - December 28, 1978

Author: John L. Vossen

Language: English
eBook ISBN:
9 7 8 - 0 - 3 2 3 - 1 3 8 9 8 - 7

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together… Read more

Thin Film Processes

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Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.