Thin Film Processes
- 1st Edition - November 12, 2012
- Latest edition
- Author: John L. Vossen
- Language: English
- Paperback ISBN:9 7 8 - 0 - 1 2 - 3 9 6 0 2 7 - 6
- eBook ISBN:9 7 8 - 0 - 3 2 3 - 1 3 8 9 8 - 7
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together… Read more
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.
Advanced undergraduate, and graduate students studying chemistry.
Introduction. J.L. Vossen, Physical Methods of Film Deposition. J.L. Vossen and J.J. Cuomo, Glow Discharge Sputter Deposition. J.A. Thornton and A.S. Penfold, Cylindrical Magnetron Sputtering. D.B. Fraser, The Sputter and S-Gun Magnetrons. R.K. Waits, Planar Magnetron Sputtering. J.M.E. Harper, Ion Beam Deposition. Chemical Methods of Film Deposition. F.A. Lowenheim, Deposition of Inorganic Films from Solution. W. Kern and V.S. Ban, Chemical Vapor Deposition of Inorganic Thin Films. Physical-Chemical Methods of Film Deposition J.R. Hollahan and R.S. Rosler, Plasma Deposition of Inorganic Thin Films. H. Yasuda, Glow Discharge Polymerization. Etching Processes. W. Kern and C.A. Deckert, Chemical Etching. C.M. Melliar-Smith and C.J. Mogab, Plasma-Assisted Etching Techniques for Pattern Delineation. References. Index.
- Edition: 1
- Latest edition
- Published: November 12, 2012
- Language: English
JV
John L. Vossen
Affiliations and expertise
RCA Laboratories, Princeton, New JerseyRead Thin Film Processes on ScienceDirect