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Thin Film Processes II

1st Edition - April 28, 1991

Author: Werner Kern

Editor: John L. Vossen

Language: English
eBook ISBN:
9 7 8 - 0 - 0 8 - 0 5 2 4 2 1 - 4

This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately… Read more

Thin Film Processes II

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This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques.