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Elsevier

Silicides for VLSI Applications

  • 1st Edition - December 2, 2012
  • Latest edition
  • Author: Shyam P. Murarka
  • Language: English

Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published… Read more

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Description

Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.

Readership

It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.

Table of contents

Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.

Product details

  • Edition: 1
  • Latest edition
  • Published: December 2, 2012
  • Language: English

About the author

Shyam P. Murarka

Author
Affiliations and expertise
Bell Telephone Laboratories

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