Silicides for VLSI Applications
- 1st Edition - March 28, 1983
- Author: Shyam P. Murarka
- Language: English
- Hardback ISBN:9 7 8 - 0 - 1 2 - 5 1 1 2 2 0 - 8
- eBook ISBN:9 7 8 - 0 - 0 8 - 0 5 7 0 5 6 - 3
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published… Read more
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.
Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.
- Edition: 1
- Published: March 28, 1983
- Language: English
SM
Shyam P. Murarka
Affiliations and expertise
Bell Telephone LaboratoriesRead Silicides for VLSI Applications on ScienceDirect