Skip to main content

Save up to 20% on Elsevier print and eBooks with free shipping. No promo code needed.

Save up to 20% on print and eBooks.

Semiconductor Industrial Hygiene Handbook

Monitoring, Ventiliation, Equipment and Ergonomics

1st Edition - December 31, 1995

Authors: David G. Baldwin, Paul C. Manz, Michael E. Williams

Language: English
eBook ISBN:
9 7 8 - 0 - 8 1 5 5 - 1 8 9 7 - 6

This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The… Read more

Semiconductor Industrial Hygiene Handbook

Purchase options

LIMITED OFFER

Save 50% on book bundles

Immediately download your ebook while waiting for your print delivery. No promo code is needed.

Institutional subscription on ScienceDirect

Request a sales quote
This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.