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SEM Microcharacterization of Semiconductors
- 1st Edition, Volume 12 - January 28, 1989
- Editors: D. B. Holt, D. C. Joy
- Language: English
- Hardback ISBN:9 7 8 - 0 - 1 2 - 3 5 3 8 5 5 - 0
- eBook ISBN:9 7 8 - 1 - 4 8 3 2 - 8 8 6 7 - 3
Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes… Read more
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Request a sales quoteApplications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.
Condensed matter physicists, surface and materials scientists, electronic and optics engineers, and solid state chemists.
Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.
- No. of pages: 452
- Language: English
- Edition: 1
- Volume: 12
- Published: January 28, 1989
- Imprint: Academic Press
- Hardback ISBN: 9780123538550
- eBook ISBN: 9781483288673
DH
D. B. Holt
Affiliations and expertise
Imperial College of Science and TechnologyDJ
D. C. Joy
Affiliations and expertise
University of TennesseeRead SEM Microcharacterization of Semiconductors on ScienceDirect