Preparation and Properties of Thin Films

Contributors

Preface

Part I. Introduction

1 Preparation and Property Correlations in Thin Films

Part II. Variation Of Microstructure Of Thin Films

2 Molecular Beam Epitaxy of Superlattices in Thin Films

I. Introduction

II. Molecular Beam Epitaxy

III. Structure of Semiconductor Superlattices

IV. Properties of Superlattice Structures

V. Concluding Remarks

References

3 Epitaxial Growth of Silicon Structures—Thermal, Laser-, and Electron-Beam-Induced

I. Introduction

II. Thermal and Laser-Induced Epitaxy: Implanted-Amorphous Silicon

III. Deposited Layers of Silicon on Silicon

IV. Epitaxial Suicides

V. Crystallization of Deposited Films

VI. Summary

References

4 Characterization of Grain Boundaries in Bicrystalline Thin Films

I. Introduction

II. Structure of Grain Boundaries

III. Properties of Grain Boundaries

IV. Preparation of Bicrystalline Thin Films

V. Characterization of Grain Boundary Structure

VI. Recent Experimental Results

VII. Summary

VIII. Perspective

References

5 Mechanical Properties of Thin Films on Substrates

I.Introduction

II.Biaxial Strain Model

III.Strain Relaxation Mechanisms

IV.Strain Relaxation by Dislocation Glide

V.Strain Relaxation by Diffusional Creep

VI.Strain at Grain Boundaries

VII.Strain and Stress at Film Edges

VIII.Microstructures Which Affect Mechanical Properties of Thin Films

IX.Application

References

Part III. Variation Of Composition Of Thin Films

6 Ion Beam Modification of Thin Films

I. Introduction

II. Range and Energy Deposition

III. Sputtering-Induced Compositional Changes

IV Implanted Metastable Phases

V. Ion-Beam-Induced Reactions of Metal Films

References

7 Thin Alloy Films for Metallization in Microelectronic Devices

I. Introduction

II. Metallurgical Degradation in Microelectronic Devices

III. Near-Equilibrium Multilayered Thin-Film Structure

IV Applications of Thin Alloy Films in Forming Shallow Suicide Contacts

V. Conclusion

References

Part Iv Variation Of Pattern Of Thin Films

8 Fabrication and Physical Properties of Ultrasmall Structures

I. Introduction

II. Fabrication

III. Physical Properties

IV. Summary

References

Index