Plasma Polymerization

Preface 1 Introduction Text References 2 Scope of Polymer Formation by Plasma Polymerization 2.1 Preferred Form of Plasma Polymers 2.2 Plasma-State Polymerization versus Plasma-Induced Polymerization 2.3 Plasma Polymerization versus Graft Polymerization 2.4 Plasma Polymerization versus Radiation Polymerization References 3 Fundamental Aspects of Gas-Phase Reactions 3.1 Gas in a Closed System 3.2 Diffusion and Flow of Gas 3.3 Flow Rate and System Pressure of Flow References 4 Fundamental Aspects of Ionized Gas 4.1 Plasma for Plasma Polymerization 4.2 Macroscopic Treatment of Glow Discharge 4.3 Microscopic Treatment of Glow Discharge 4.4 Microscopic Treatment of Plasma References 5 Fundamental Aspects of Polymerization 5.1 Classification of Polymerization by Growth Mechanism 5.2 Addition Polymerization 5.3 Radiation Polymerization 5.4 Polymerization in a Vacuum References 6 Kinetic and Mechanistic Aspects of Plasma Polymerization 6.1 Role of Ionization in Plasma Polymerization 6.2 Growth Mechanism of Plasma Polymerization 6.3 Reactive Species in Plasma Polymerization 6.4 Free Radicals in Plasma Polymers 6.5 Incorporation of Non Polymerizable Gases in Plasma Polymers 6.6 Interpretation of Plasma Diagnostic Data 6.7 Interpretation of Polymer Properties 6.8 Atomic (Nonmolecular) Nature of Plasma Polymerization References 7 Competitive Ablation and Polymer Formation in Plasma 7.1 Overall Reactions in a Plasma Polymerization System 7.2 Classification of Gases for Plasma 7.3 Ablation By Plasma 7.4 Dependence of Ablation on Operational Parameters 7.5 Simultaneous Sputter Coating and Plasma Polymerization References 8 Kinetic and Mechanistic Aspects of Polymer Deposition in Plasma Polymerization 8.1 Polymerization and Deposition Mechanisms 8.2 Mass Balance in a Plasma Polymerization System 8.3 Distribution of Polymer Deposition 8.4 Dependence of Growth Reactions on Diffusional (Kinetic) Path Length 8.5 Polymer Deposition in a Closed System and in a Flow System 8.6 Overall Kinetics of Polymer Deposition 8.7 Simultaneous Polymerization-Deposition Mechanisms References 9 Operational Parameter s of Plasma Polymerization 9.1 Pressure of a Steady-State Flow System 9.2 System Pressure under a Glow Discharge 9.3 Factors That Determine Pressure under a Glow Discharge 9.4 Monomer Flow Rate 9.5 Determination of Flow Rate 9.6 Meaning of Flow Rate in a Plasma Polymerization System 9.7 Power Input of Plasma Polymerization 9.8 Effect of Power on the Volume and Intensity of Plasma 9.9 Plasma Energy Density and Input Power 9.10 Discharge Power for Polymer-Forming Plasma 9.11 Composite Power Parameter for Plasma Polymerization 9.12 Domains of Plasma Polymerization 9.13 Location of Polymer-Collecting Surface and Frequency of Electric Power Source 9.14 Stationary and Moving Substrates 9.15 Magnetron Discharge for Plasma Polymerization References 10 General Characteristics of Plasma Polymers 10.1 Free Radicals in Plasma Polymers 10.2 Internal Stress in Plasma Polymers 10.3 Solubility and Fusibility of Plasma Polymers 10.4 Surface Properties of Plasma Polymers 10.5 Permeability Characteristics of Plasma Polymers 10.6 Adhesion of Plasma Polymers References 11 Electrical Properties of Plasma-Polymerized Thin Organic Films 11.1 Historical Background 11.2 Dielectric Properties of Plasma-Polymerized Organic Films 11.3 Electrical Conduction in Plasma-Polymerized Organic Films 11.4 Concluding Remarks References Index