Plasma Diagnostics

Contributors

Preface


1 Optical Diagnostic Techniques for Low Pressure Plasmas and Plasma Processing

I. Introduction

II. Plasma-Induced Optical Emission

III. Absorption Spectroscopy

IV. Laser Techniques

V. Optical Techniques for Plasma-Surface Interactions

VI. Summary

VII. Acknowledgements

References


2 Plasma Diagnostics in Electric Discharge Light Sources

I. Introduction

II. Diagnostic Techniques Employed

III. Summary and Conclusions

IV. Acknowledgements

References


3 How Langmuir Probes Work

I. Introduction

II. Interpretation of Semi-Infinite Planar Langmuir Probe Data

III. Effects of Finite Probe Size and Shape

IV. Effects of Ion-Neutral Collisions

V. Probes in Magnetic Fields

VI. Secondary Electron Effects

VII. Emissive Probes

VIII. Probe Perturbations

IX. Fluctuating Plasma Potentials

X. Probe Contamination

XI. Langmuir Probe Circuits

XII. Direct Electron Temperature Measurements

XIII. Directional Probe

XIV. Conclusion

XV. Acknowledgements

References


4 Mass Spectrometry of Plasmas

I. Introduction

II. Plasma Flux Analysis

III. Partial Pressure Analysis

IV. Flux Analysis of Plasmas: Energy Selection and Mass Filtering

V. Mass Filtering

VI. Flux Analysis: Neutral Species

VII. Experimental Considerations and Applications: Flux Analysis of Plasmas

VIII. Experimental Considerations and Applications: Partial Pressure Analysis

IX. Acknowledgements

References


5 Microwave Diagnostics

I. Introduction

II. How to Get Started: A Simple Microwave Diagnostics Apparatus

III. Cavity and Waveguide Diagnostic Techniques

IV. Interferometric Techniques

V. Microwave Scattering and Radiometry

VI. Plasma Waves and Their Applications in Microwave Diagnostics

References


6 Paramagnetic Resonance as a Plasma Discharge Diagnostic

I. Introduction

II. Basic Theory

III. Application

IV. Discussion

V. Acknowledgements

References


7 Diagnostics in Thermal Plasma Processing

I. Introduction

II. Methods for Production and Characterization of Plasmas

III. Specific Problems Related to Measurements under Thermal Plasma Conditions

IV. Plasma Flow Diagnostics

V. Measurements of Particle Parameters in Thermal Plasmas

VI. Conclusions

VII. Acknowledgements

References