Plasma Diagnostics
Discharge Parameters and Chemistry
- 1st Edition - February 28, 1989
- Imprint: Academic Press
- Editors: Orlando Auciello, Daniel L. Flamm
- Language: English
- Paperback ISBN:9 7 8 - 1 - 4 8 3 2 - 0 2 8 1 - 5
- eBook ISBN:9 7 8 - 1 - 4 8 3 2 - 1 6 2 4 - 9
Plasma Diagnostics, Volume 1: Discharge Parameters and Chemistry covers seven chapters on the important diagnostic techniques for plasmas and details their use in particular… Read more
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Request a sales quotePlasma Diagnostics, Volume 1: Discharge Parameters and Chemistry covers seven chapters on the important diagnostic techniques for plasmas and details their use in particular applications. The book discusses optical diagnostic techniques for low pressure plasmas and plasma processing; plasma diagnostics for electrical discharge light sources; as well as Langmuir probes. The text also describes the mass spectroscopy of plasmas, microwave diagnostics, paramagnetic resonance diagnostics, and diagnostics in thermal plasma processing. Electrical engineers, nuclear engineers, microwave engineers, chemists, and technical personnel in universities, industry, and national laboratories will find the book invaluable.
Contributors
Preface
1 Optical Diagnostic Techniques for Low Pressure Plasmas and Plasma Processing
I. Introduction
II. Plasma-Induced Optical Emission
III. Absorption Spectroscopy
IV. Laser Techniques
V. Optical Techniques for Plasma-Surface Interactions
VI. Summary
VII. Acknowledgements
References
2 Plasma Diagnostics in Electric Discharge Light Sources
I. Introduction
II. Diagnostic Techniques Employed
III. Summary and Conclusions
IV. Acknowledgements
References
3 How Langmuir Probes Work
I. Introduction
II. Interpretation of Semi-Infinite Planar Langmuir Probe Data
III. Effects of Finite Probe Size and Shape
IV. Effects of Ion-Neutral Collisions
V. Probes in Magnetic Fields
VI. Secondary Electron Effects
VII. Emissive Probes
VIII. Probe Perturbations
IX. Fluctuating Plasma Potentials
X. Probe Contamination
XI. Langmuir Probe Circuits
XII. Direct Electron Temperature Measurements
XIII. Directional Probe
XIV. Conclusion
XV. Acknowledgements
References
4 Mass Spectrometry of Plasmas
I. Introduction
II. Plasma Flux Analysis
III. Partial Pressure Analysis
IV. Flux Analysis of Plasmas: Energy Selection and Mass Filtering
V. Mass Filtering
VI. Flux Analysis: Neutral Species
VII. Experimental Considerations and Applications: Flux Analysis of Plasmas
VIII. Experimental Considerations and Applications: Partial Pressure Analysis
IX. Acknowledgements
References
5 Microwave Diagnostics
I. Introduction
II. How to Get Started: A Simple Microwave Diagnostics Apparatus
III. Cavity and Waveguide Diagnostic Techniques
IV. Interferometric Techniques
V. Microwave Scattering and Radiometry
VI. Plasma Waves and Their Applications in Microwave Diagnostics
References
6 Paramagnetic Resonance as a Plasma Discharge Diagnostic
I. Introduction
II. Basic Theory
III. Application
IV. Discussion
V. Acknowledgements
References
7 Diagnostics in Thermal Plasma Processing
I. Introduction
II. Methods for Production and Characterization of Plasmas
III. Specific Problems Related to Measurements under Thermal Plasma Conditions
IV. Plasma Flow Diagnostics
V. Measurements of Particle Parameters in Thermal Plasmas
VI. Conclusions
VII. Acknowledgements
References
- Edition: 1
- Published: February 28, 1989
- No. of pages (eBook): 470
- Imprint: Academic Press
- Language: English
- Paperback ISBN: 9781483202815
- eBook ISBN: 9781483216249
OA
Orlando Auciello
Affiliations and expertise
Microelectronics Center of North Carolina and North Carolina UniversityRead Plasma Diagnostics on ScienceDirect