Nucleation and Growth of Metals
From Thin Films to Nanoparticles
- 1st Edition - July 22, 2016
- Author: Paul-Henri Haumesser
- Language: English
- Hardback ISBN:9 7 8 - 1 - 7 8 5 4 8 - 0 9 2 - 8
- eBook ISBN:9 7 8 - 0 - 0 8 - 1 0 1 2 0 3 - 1
Nucleation and Growth of Metals: From Thin Films to Nanoparticles explores how nucleation and growth phenomena condition the morphology and related characteristics of metallic… Read more
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explores how nucleation and growth phenomena condition the morphology and related characteristics of metallic thin films and nanoparticles to help control the functional properties of these objects.The book brings a rigorous theoretical approach to nucleation and growth phenomena, with a particular focus on the essential aspects and outcomes of this theory. The author explores a general framework for the nucleation and growth of condensed phases from liquid solutions. Practical situations are extensively described, providing state-of-the art information on Cu electroplating and related processes for the fabrication of advanced interconnects and elaboration of metallic nanoparticles.
- Derives the basic equations of nucleation from fundamental thermodynamic and kinetic relations
- Explores the main outcomes of a range of nucleation theories
- Features practical examples to further develop the theoretical aspects
- Provides state-of-the art information on Cu electroplating and related processes for the fabrication of advanced interconnects and elaboration of metallic nanoparticles
Students and young scientists in the fields of thin-films or nanomaterials, or those more generally interested in nucleation phenomena; engineers or industrial practitioners in microelectronics or nanotechnology and related fields
- Dedication
- Acknowledgments
- Introduction
- 1: The Fabrication of Micro- and Nanostructures
- Abstract
- 1.1 The fabrication of advanced interconnect structures in microelectronic devices
- 1.2 Elaboration of metallic NPs
- 1.3 Conclusions
- 2: Phase Transition: Nucleation, Growth, Aggregation and Coalescence
- Abstract
- 2.1 What is the easiest path for a phase transition?
- 2.2 Nucleation
- 2.3 Growth
- 2.4 Aggregation
- 2.5 Coalescence
- 2.6 Conclusions
- 3: The Precipitation of Metals: Thin Film Electroplating and Nanoparticle Synthesis
- Abstract
- 3.1 Principles of metal electroplating
- 3.2 Chemical synthesis of metallic nanoparticles
- 3.3 Conclusions
- 4: Copper Electroplating: from Superconformal to Extreme Fill
- Abstract
- 4.1 Copper electroplating
- 4.2 Superconformal fill of damascene trenches
- 4.3 Extreme fill of TSVs
- 4.4 Conclusions
- 5: Nucleation and Growth of Metallic Thin Films
- Abstract
- 5.1 Seed layer enhancement
- 5.2 Electroless deposition of self-aligned metallic barriers
- 5.3 Conclusions
- 6: Nucleation and Stabilization of Metallic Nanoparticles in Ionic Liquids
- Abstract
- 6.1 What are ionic liquids?
- 6.2 Chemical synthesis of metallic NPs in ILs
- 6.3 Interactions between ILs and NPs
- 6.4 Size evolution of Ru-NPs
- 6.5 Conclusions
- Appendix 1: Demonstration of the General Expression for the Nucleation Rate
- Appendix 2: Stationary Cluster Population and Nucleation Rate
- A2.1 For discrete n values
- A2.2 For continuous n values
- Appendix 3: Where is the Surface of the Cluster?
- Glossary
- List of Acronyms
- Bibliography
- Index
- No. of pages: 208
- Language: English
- Edition: 1
- Published: July 22, 2016
- Imprint: ISTE Press - Elsevier
- Hardback ISBN: 9781785480928
- eBook ISBN: 9780081012031
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