Limited Offer
Save 50% on book bundles
Immediately download your ebook while waiting for your print delivery. No promo code needed.
![Book bundle cover eBook and print](https://images.ctfassets.net/ahaoy9whsr8a/3hh8459sY2nXIBbSiKJFQm/ed36678e72516d39f8a78ab741be67ec/book-promo-banner3.png?fm=webp&w=400&q=75)
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels… Read more
Limited Offer
• Introduction
• Photolithographic Microfabrication
• Micromaching by Machine Tools
• Tribological Aspects of Microsystems
• Silicon Microsensors
• Micro-Actuators for Micro-Robots: Electric and Magnetic
• Energy Source and Power Supply Method
• Control Method of Micro Mechanical Systems
• Examples of Microsystems
• Future Problems
TF
WM