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Materials Science in Microelectronics II

The Effects of Structure on Properties in Thin Films

  • 2nd Edition - December 9, 2005
  • Latest edition
  • Author: Eugene Machlin
  • Language: English

The subject matter of thin-films – which play a key role in microelectronics – divides naturally into two headings: the processing / structure relationship, and the structure /… Read more

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The subject matter of thin-films – which play a key role in microelectronics – divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: • Electrical properties• Magnetic properties• Optical properties• Mechanical properties• Mass transport properties• Interface and junction properties• Defects and properties