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Materials Science in Microelectronics I

The Relationships Between Thin Film Processing and Structure

  • 2nd Edition - September 21, 2005
  • Author: Eugene Machlin
  • Language: English
  • Hardback ISBN:
    9 7 8 - 0 - 0 8 - 0 4 4 6 4 0 - 0
  • eBook ISBN:
    9 7 8 - 0 - 0 8 - 0 4 5 9 6 0 - 8

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure… Read more

Materials Science in Microelectronics I

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Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film’s surface during the period that one monolayer exists - before being buried in the next layer – determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.