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Materials Aspects in Microsystem Technologies

  • 1st Edition, Volume 83 - August 13, 1999
  • Editors: D. Barbier, J.R. Morante, P. Temple-Boyer, G. Mueller, W. Lang
  • Language: English
  • Hardback ISBN:
    9 7 8 - 0 - 0 8 - 0 4 3 6 1 1 - 1
Materials Aspects in Microsystem Technologies

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