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Laser Microfabrication

Thin Film Processes and Lithography

  • 1st Edition - May 28, 1989
  • Latest edition
  • Editors: Daniel J. Ehrlich, Jeffrey Y. Tsao
  • Language: English

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful… Read more

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Elsevier academics book covers
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

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