Laser Microfabrication
Thin Film Processes and Lithography
- 1st Edition - May 28, 1989
- Latest edition
- Editors: Daniel J. Ehrlich, Jeffrey Y. Tsao
- Language: English
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful… Read more
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
Researchers in semiconductor/thin-film processing and laser chemistry and electrical engineers in the areas of device fabrication and lithography and students in these areas.
Technology. Y.S. Liu, Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography. Fundamentals. T.J. Chuang, Laser-Stimulated Molecular Processes on Surfaces. M. Rothschild, Spectroscopy and Photochemistry of Gases, Adsorbates, and Liquids. C.I.H. Ashby and J.Y. Tsao, Photophysics and Thermophysics of Light Absorption and Energy Transport in Solids. H.J. Zeiger, D.J. Ehrlich, and J.Y. Tsao, Transport and Kinetics. Reactions. J.J. Ritsko, Laser Etching. R.L. Jackson, T.H. Baum, T.T. Kodas, D.J. Ehrlich, and P.B. Comita, Laser Deposition: Energetics and Chemical Kinetics. J. Haigh and M.R. Aylett, Laser Deposition: Experimental Approaches. S.J.C. Irvine, Epitaxy. I.W. Boyd, Doping and Oxidation. Index.
- Edition: 1
- Latest edition
- Published: May 28, 1989
- Language: English
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Daniel J. Ehrlich
Affiliations and expertise
MIT--Lincoln LaboratoryJT
Jeffrey Y. Tsao
Affiliations and expertise
Sandia National LaboratoriesRead Laser Microfabrication on ScienceDirect