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Laser Microfabrication

Thin Film Processes and Lithography

  • 1st Edition - May 28, 1989
  • Editors: Daniel J. Ehrlich, Jeffrey Y. Tsao
  • Language: English
  • eBook ISBN:
    9 7 8 - 0 - 0 8 - 0 9 1 8 0 2 - 0

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful… Read more

Laser Microfabrication

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This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.