Ion Implantation into Semiconductors, Oxides and Ceramics
- 1st Edition, Volume 85 - March 1, 1999
- Editors: B.G. Svensson, H.A. Atwater, J.K.N. Lindner, P.L.F. Hemment
- Language: English
- Hardback ISBN:9 7 8 - 0 - 0 8 - 0 4 3 6 1 3 - 5
These proceedings contain the reviewed papers presented at the Symposium J on "Ion Implantation into Semiconductors, Oxides and Ceramics", which was held at the Spring Meeting of… Read more
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Request a sales quoteThese proceedings contain the reviewed papers presented at the Symposium J on "Ion Implantation into Semiconductors, Oxides and Ceramics", which was held at the Spring Meeting of the European Materials Research Society in Strasbourg, France, 16-19, June 1998. The symposium attracted 110 contributions, with authors from 31 nations in 5 continents. It was thereby the largest in a series of E-MRS ion beam symposia, documenting the importance of ion beam techniques and research in this area.
The aim of this symposium was to provide a forum for the discussion of new results in the implantation of materials from three different classes: semiconductors, oxides and ceramics.
- Language: English
- Edition: 1
- Volume: 85
- Published: March 1, 1999
- Imprint: Elsevier Science
- Hardback ISBN: 9780080436135
BS
B.G. Svensson
HA
H.A. Atwater
JL
J.K.N. Lindner
PH