International Progress in Precision Engineering

Keynote Address Precision Engineering and its Impact on the Electronics Industry: Past, Present, and Future Oral SessionsSession 1: Metrology - The Science Base for Precision Engineering Limitations of Interpolation Accuracy in Heterodyne Interferometry A New Ultra-Precision Instrument for Calibration of Gauges and Measurements of High-Quality Products Correctness of Assessment Software in Coordinate Metrology Concept for the Traceability of Measurements with Coordinate Measuring MachinesSession 2: Sensors and Actuators in Precision Engineering and Nanotechnology A Six-Degrees of Freedom Fine Motion Mechanism Three Dimensional Position Sensor Using Optical Collimator for Nanometer ResolutionSession 3: New Materials - Applications and Ultra-Precision Energy Beam Processing Laser Photo-etching Method for Maskless Fabrication of a Through-Hole Contact (THC) AmorphousSilicon (a-Si) Solar Cell Submodule Plasma CVM (Chemical Vapor Machining) - A Chemic. Machining Method with Equal Performances toConventional Mechanical Methods from the Sense of Removal Rates and Spatial Resolutions Broad Ion Beam Processing of Large Surface Areas with Nanometer Precision Principle of Ion Beam Processing and its Application to Fine and Precision FabricationSession 4: Nanotechnology Machining Processes 3-Dimensional Rigid-Plastic FEM Simulation of Chip Formation Process Tools and Tool Setting for Improved Surface Finish in Diamond Turning Electrolytic In-process Dressing (ELID) Grinding for Optical Parts ManufacturingSession 5: New Developments in Ultra-Precision Machines Development of the Ingersoll Octahedral-Hexapod Machine Tool for Five-Axis Metal Cutting Development of an Ultraprecision Grinding Equipment for Ductile Mode Surface Finishing of Brittle Materials Examination and Optimization of Dispersion and Hysteresis of Linear Axis by Machine Tools Precision Grinding and Slicing of Si-WafersSession 6: Ultra-Precision, Servo, and Control Technology Magnetic Linear Bearing: Theory and Experiment State Space Trajectory Tracking Control for Fast Nanometer Positioning Development of Methods for Numerical Error Correction of Machine Tools The Real-Time Reduction of Electronic Interpolation Errors in Precision Machine ServosSession 7: Precision Engineering in Space Technology Development of an X-Ray Telescope in Japan Active Mirror Support System for SUBARU TelescopeSession 8: X-Ray Technologies and Their Applications TOMOHAWK - Recent Advances in Computerised X-Ray Tomography Using Real-Time Radiography Equipment COXI - A Combined Optical and X-Ray Interferometer for High Precision Dimensional MetrologySession 9: Micromechanics and Micrometrology The Constant Force Profiler: A Hybrid Instrument for Nanometric Surface Metrology Development of a Scanning Force Microscope Using a Piezoelectric Cantilever Miniature Robots for Ultra Precision Measurement and MachiningSession 10: New Developments in Precision Engineering Bio-Machining of Metals by Bacteria Thiobacillus Ferrooxidans A Precision Bilaminar Resonating Transducer Assembly Tool Application of a Nanometric Resolution Optical Tool Setting System to Aspheric GenerationPoster Sessions Kinematic and Mathematical Research on Three-Point-Method for In-Process Measurement and its Applications in Engineering Ordinal Space and Evaluation of Geometric Form for Precision Engineering Research on the Theory and Technique of Omni - Directional Straightness Evaluation New Method of Geometric-Error Evaluation (GE) The Development of High Accuracy Turning Multiple Measurement and Control System Automatic Linear Measuring System for Line Standard and Step Gage On-Machine Measurement of Form Accuracies Using Two Quadrant Photocells Self-Calibration of Precision Angle Sensors Tilt Effects on Optical Angle Measurements 3-Dimensional Coordinate Measurements by Image Digitizing Development of Efficient Error Calibration System for CMMs Using Calibrated Ring Gauges and Touch Probe Self-Calibration Method for Three Dimensional Coordinate Measuring Machines Using a Ball Plate An Exact and Function Independent Bestfit Algorithm, Applicable to Sculptured Surfaces or to Any Non Regular Surface in Parametric Form An Inspection System for Wire Bond Ball Dimensions On Line Simultaneous Measurement of Real Contact Area and Approach of Two Nominally Flat Surfaces Under Load Direct Measurement of Spindle Radial Accuracy by Moiré Topography The Optimum EST - A New Method for On-Line Measurement of the Straighteness of Precision Machine Tools and Machined Workpiece Study on a Laser Fiber Alignment System and its Applications Measurement and Control of Straight Motion Accuracy Using Liquid Surface for Absolute Reference Direction Stabilized Laser Beam for Straight Datum 3D Topography Representation of Machined Surfaces: A Study on the Integration of Some Characterisation Techniques Sphericity Noncontact Testing Using Phase-Shifting Interferometry Measurement of the Absolute Refractive Index of Air by Laser Interferometry A Micro Bending Device for Tool Materials Development of an Optical Measuring Method for Radial Spindle Error A Novel Surface Topography Sensor in the nm Range Based on a Non-Counting Diode Laser Inteferometer An Active Parallel Leaf Spring Mechanism with a Long Working Range and a High Positioning Resolution An Etched Glass Master and a Photomask for an Optical Disk Substrate Low Temperature Growth of Polycrystalline Silicon Films by Plasma Chemical Vapor Deposition under Higher Pressure than Atmospheric Pressure A New Low Temperature Fabrication Technology of Ceramic Thin Film Using Ion Beam and its Application Enlargement of Poly-Si Film Grain Size by a New Excimer Laser Annealing and its Application to High-Performance Poly-Si TFT On the Origin of Material Induced Vibration in Ultraprecision Machining of Crystalline Materials Fundamental Study on Energy Dissipation and Tool Shape in Nanoscale Cutting Study on the Extremely High Compressive Residual Stresses in Machined Layers by Using X-Ray Computer Simulation on Affected-Layer Generation in Grinding Observation of Micro-deformation Behavior of Brittle Materials in Indentation Testings at Sub-µm Depth Analysis of Contact Lens Mirror Finishing by Diamond Turning Crystallographic Orientation Analysis on Wear Shape of Single Crystal Diamond Cutting Tool The Influence of Cutting Edge Quality on Workpiece Roughness in Diamond Turning Process Evaluation of Polished Silicon Wafers' Micro-Roughness by Atomic Force Microscope Formation of Surface Micro-form Using Magnetic Super-fine Particles A Study on Nano-surface Polishing of Magnetic Disk Substrate Characterization of Process Damaged Layers for Optical Fiber Ends Ductile-Regime Machining of Glassy Carbon Ultraprecision Ductile Cutting of Brittle Materials by Applying Ultrasonic Vibration Improvement of Rotary Ultrasonic Deep Hole Drilling of Glass Ceramics - Zerodur Mechanical Displacement and Removal Mechanisms in Forming and Finishing of Classically Brittle Materials Truing of Super-Abrasive Wheels for Form-Grinding Ultra High Speed Grinding of the Glass with a Single Point Diamond Study on the Optimum Crowning Both for Tooth Profile and Tooth Trace of Spiral Bevel Gear Characterization of High Precision Parallel Spring Translators Improvement of Nano-Positioning Toolholder - Compensation of Form Error of the Faceplate Improvement of Thermal Properties of a Hydrostatic Spindle An Active Control of an Externally Pressurized Air Thrust Bearing The Trial Manufacture of High Precision Rotating Spindle Development of Off-Axis Ellipsoidal Mirrors Ultra-Precision Machining of Oxygen-Free Copper and Aluminum Development of Amendable Machining System and Evaluation of its Performance Perpendicular Guideway Mechanism of Machine Tool - Improvement of Motion Accuracy by Composite Bearing Guideway Hysteresis Exclude System of Linear Axes of Machine Tools A Twist-Roller Friction Drive System for Nanometer Positioning Control of a Traction Drive System Control of permanent magnets brushless electrical motors. Performances of an Internal Model Control Algorithm A Micro Grooving System for Ultra Precision Parts Optimal Controller for the Axis Drift in a Precision Boring Bar with Double-Guide Hydraustatic Bearings Accuracy Improvement of Machine Tool by New Function of WORFAC Control of the Dynamical Behaviour of a Machine Tool with Neural Networks for Precision Cutting Development of 3-Axes Handling Robot Suspended by Active Magnetic Bearings (AMB) A Discussion on the Dynamics of Gear Noise and the Theory of Vibration Measurement and Testing in Manufacturing Technologies by Means of Industrial Robots Para-flex Stage for Wide-Range Scanning Tunneling Microscope Precise imaging technique for AFM with ZnO Whisker Tip High Precision Three Dimensional Tip Position Measurement in Scanning Tunnelling Microscopes Correction of Distorted STM Image by In-Situ Referring Regular Crystalline Lattice Nanometer Straightness Testing Instrument Surface Texture Assessment of Magnetic Rigid Disk and Head Slider for Analyzing Their Contact Mechanics in Nanometer Scale Joint Position Encoding for Micro Robotic Manipulators Computer Controlled Mask Aligner Using Modified Moire Technique An Absolute Capacitive Position Transducer for Lithography Multi-Probe Force Microscope for a Precise Linear Encoder Evaluation of the Tracking Pre-Groove of the Optical Memory Disk Stamper by Using Fraunhofer Diffraction Method A Tribo-Memory as an Application of Phase-Transformation of Stainless Steel Development of Ultraprecision Positioner by Means of Walking Drive Achievements in Manufacturing Ultra-Precise, Complex Components Using Nano-"Ductile Regime" Grinding Technical Advances in Process Science Research at the Center for Optics Manufacturing A Manufacturing Ribosome Model for Biological- Oriented Manufacturing Systems