Skip to main content

Interlayer Dielectrics for Semiconductor Technologies

  • 1st Edition - October 13, 2003
  • Editors: Shyam P Muraka, Moshe Eizenberg, Ashok K Sinha
  • Language: English
  • Hardback ISBN:
    9 7 8 - 0 - 1 2 - 5 1 1 2 2 1 - 5
  • eBook ISBN:
    9 7 8 - 0 - 0 8 - 0 5 2 1 9 5 - 4

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic… Read more

Interlayer Dielectrics for Semiconductor Technologies

Purchase options

Limited Offer

Save 50% on book bundles

Immediately download your ebook while waiting for your print delivery. No promo code is needed.

Book bundle cover eBook and print

Institutional subscription on ScienceDirect

Request a sales quote
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges.

Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.