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Impurity Doping Processes in Silicon

1st Edition, Volume 2 - January 1, 1981

Editor: F.F.Y. Wang

Language: English
eBook ISBN:
9 7 8 - 0 - 0 8 - 0 9 8 3 5 7 - 8

This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in… Read more

Impurity Doping Processes in Silicon

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This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many texts, this work describes the double-diffusion method.