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Handbook of Silicon Based MEMS Materials and Technologies

  • 1st Edition - April 1, 2000
  • Editors: Markku Tilli, Mervi Paulasto-Kröckel, Teruaki Motooka, Veikko Lindroos, Veli-Matti Airaksinen, Sami Franssila, Ari Lehto
  • Language: English
  • eBook ISBN:
    9 7 8 - 0 - 8 1 5 5 - 1 9 8 8 - 1

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key to… Read more

Handbook of Silicon Based MEMS Materials and Technologies

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.

Key topics covered include:

Silicon as MEMS material

Material properties and measurement techniques

Analytical methods used in materials characterization

Modeling in MEMS

Measuring MEMS

Micromachining technologies in MEMS

Encapsulation of MEMS components

Emerging process technologies, including ALD and porous silicon

Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities.

Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland.

Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland.

Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland.

Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan.