Handbook of Semiconductor Wafer Cleaning Technology
Science, Technology and Applications
- 1st Edition - December 31, 1993
- Author: Werner Kern
- Editor: Werner Kern
- Language: English
This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly… Read more
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This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co
Overview and Evolution of Semiconductor Wafer Contamination and Cleaning TechnologyTrace Chemical Contamination on Silicon SurfacesAqueous Cleaning ProcessesParticle Deposition and AdhesionOverview of Dry Wafer Cleaning ProcessesU
- Edition: 1
- Published: December 31, 1993
- Language: English
WK
Werner Kern
Affiliations and expertise
Lam Research, San Diego, CA, USAWK
Werner Kern
Affiliations and expertise
Lam Research, San Diego, CA, USA