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Fundamental Principles of Engineering Nanometrology
1st Edition - September 3, 2009
Author: Richard Leach
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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and… Read more
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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.
Provides a basic introduction to measurement and instruments
Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)
Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers
1. Introduction to metrology for micro- and nanotechnology
2. Some basics of measurement
3. Precision measurement instrumentation - some design principles
4. Length traceability using interferometry
5. Displacement measurement
6. Surface topography measurement instrumentation
7. Scanning probe and particle beam microscopy
8. Surface topography characterisation
9. Co-ordinate metrology
10. Mass and force measurement References Appendix A SI units of measurement and their realisation at NPL Appendix B SI derived units
No. of pages: 352
Published: September 3, 2009
Imprint: William Andrew
eBook ISBN: 9781437778328
Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati