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Fabrication and Design of Resonant Microdevices

1st Edition - September 3, 2008

Author: Behraad Bahreyni

Language: English
Hardback ISBN:
9 7 8 - 0 - 8 1 5 5 - 1 5 7 7 - 7
eBook ISBN:
9 7 8 - 0 - 8 1 5 5 - 1 9 7 1 - 3

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output… Read more

Fabrication and Design of Resonant Microdevices

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This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.