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Fabrication and Design of Resonant Microdevices
- 1st Edition - September 3, 2008
- Author: Behraad Bahreyni
- Language: English
- Paperback ISBN:9 7 8 - 0 - 3 2 3 - 2 8 1 6 0 - 7
- Hardback ISBN:9 7 8 - 0 - 8 1 5 5 - 1 5 7 7 - 7
- eBook ISBN:9 7 8 - 0 - 0 8 - 0 9 4 7 5 7 - 0
- eBook ISBN:9 7 8 - 0 - 8 1 5 5 - 1 9 7 1 - 3
This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output… Read more
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Request a sales quoteThis book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.
- Offers numerous academic and industrial examples of resonant MEMS
- Provides an analytic model of device behaviour
- Explains two-port systems in detail
- Devotes ample space to excitation and signal detection methods
- Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Engineers in the field of micromachining, the design of resonant devices, MEMS, or sensor design
- No. of pages: 250
- Language: English
- Edition: 1
- Published: September 3, 2008
- Imprint: William Andrew
- Paperback ISBN: 9780323281607
- Hardback ISBN: 9780815515777
- eBook ISBN: 9780080947570
- eBook ISBN: 9780815519713
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Behraad Bahreyni
Affiliations and expertise
Cambridge University, UKRead Fabrication and Design of Resonant Microdevices on ScienceDirect