Developments in Surface Contamination and Cleaning, Volume 7
Cleanliness Validation and Verification
- 1st Edition - November 18, 2014
- Editors: Rajiv Kohli, Kashmiri L. Mittal
- Language: English
- Paperback ISBN:9 7 8 - 0 - 1 2 - 8 1 0 3 3 0 - 2
- Hardback ISBN:9 7 8 - 0 - 3 2 3 - 3 1 3 0 3 - 2
- eBook ISBN:9 7 8 - 0 - 3 2 3 - 3 1 1 4 5 - 8
As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in… Read more

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Request a sales quoteAs device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales.The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area.The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series.Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography.
- Provides a state-of-the-art survey and best-practice guidance for scientists and engineers engaged in surface cleaning or handling the consequences of surface contamination
- Addresses the continuing trends of shrinking device size and contamination vulnerability in a range of industries, spearheaded by the semiconductor industry and others
- Includes new regulatory aspects
- Preface
- About the Editors
- Chapter 1: Sources and Generation of Surface Contaminants and Their Impact
- Abstract
- Acknowledgments
- 1 Introduction
- 2 Surface Cleanliness Levels
- 3 Sources and Generation of Contaminants
- 4 Impact of Contaminants
- 5 Summary and Conclusions
- Disclaimer
- Chapter 2: Mid-IR Spectroscopy as a Tool for Cleanliness Validation
- Abstract
- 1 Background
- 2 Principles of Grazing-Angle FTIR
- 3 Description of the Method
- 4 Advantages and Disadvantages
- 5 Results and Applications
- 6 Future Developments
- 7 Summary
- Chapter 3: Optically Stimulated Electron Emission: A Powerful Tool for Surface Cleanliness Monitoring
- Abstract
- 1 Introduction
- 2 OSEE Principle
- 3 Photoemitting Materials
- 4 Applications of OSEE
- 5 Summary
- Chapter 4: Methods for Verifying Medical Device Cleanliness
- Abstract
- 1 Background
- 2 Cleaning Issues and Concerns with Medical Devices
- 3 Extraction Techniques
- 4 Cleaning of Metal and Ceramic Components
- 5 Device Compatibility—Types of Tests and Description
- 6 Test Methods to Identify Contaminants in Extracts
- 7 Setting Limits and Biological Safety Assessment
- 8 Validation
- 9 Sources of Contamination
- 10 Cleanliness Standards, Nonviable Contamination
- 11 Future Developments
- 12 Conclusion
- Chapter 5: Cleaning Validation and Its Regulatory Aspects in the Pharmaceutical Industry
- Abstract
- 1 Introduction
- 2 Good Manufacturing Practice in API Manufacturing
- 3 Establishing the Acceptance Limits
- 4 Cleaning of Equipment
- 5 Sampling Methods for Cleaning Validation
- 6 Cleaning Method Specificity
- 7 Solvents Used for Cleaning
- 8 Cleaning Agents
- 9 Analytical Methods
- 10 Cleaning Development Phase
- 11 Cleaning Validation Protocol
- 12 Validation Report
- 13 The FDA Cleaning Validation Guideline
- 14 Effective Cleaning Validation Maintenance Program
- 15 Summary
- Index
- No. of pages: 206
- Language: English
- Edition: 1
- Published: November 18, 2014
- Imprint: William Andrew
- Paperback ISBN: 9780128103302
- Hardback ISBN: 9780323313032
- eBook ISBN: 9780323311458
RK
Rajiv Kohli
KM