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Deep Implants: Fundamentals and Applications

  • 1st Edition, Volume 3 - April 7, 2015
  • Latest edition
  • Editors: G.G. Bentini, A. Golanski, S. Kalbitzer
  • Language: English
  • Paperback ISBN:
    9 7 8 - 0 - 4 4 4 - 5 6 7 3 2 - 1
  • eBook ISBN:
    9 7 8 - 0 - 4 4 4 - 5 9 6 3 7 - 6

Deep implants are produced by the high-energy implantation of impurities in a host material. The thus created subsurface layers have properties that are different from the very… Read more

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Deep implants are produced by the high-energy implantation of impurities in a host material. The thus created subsurface layers have properties that are different from the very surface and the bulk and show great promise for application in the electronics industry.

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