Chemical Mechanical Polishing in Silicon Processing
- 1st Edition, Volume 63 - October 15, 1999
- Imprint: Academic Press
- Editors: R. K. Willardson, Shin M. Hwa Li, Robert M. Miller, Eicke R. Weber
- Language: English
- Paperback ISBN:9 7 8 - 0 - 1 2 - 4 0 1 4 9 3 - 0
- eBook ISBN:9 7 8 - 0 - 0 8 - 0 8 6 4 6 1 - 7
Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known author… Read more
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Request a sales quoteSince its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did many of these volumes make an impact at the time of their publication, but they continue to be well-cited years after their original release. Recently, Professor Eicke R. Weber of the University of California at Berkeley joined as a co-editor of the series. Professor Weber, a well-known expert in the field of semiconductor materials, will further contribute to continuing the series' tradition of publishing timely, highly relevant, and long-impacting volumes. Some of the recent volumes, such as Hydrogen in Semiconductors, Imperfections in III/V Materials, Epitaxial Microstructures, High-Speed Heterostructure Devices, Oxygen in Silicon, and others promise that this tradition will be maintained and even expanded.
Reflecting the truly interdisciplinary nature of the field that the series covers, the volumes in Semiconductors and Semimetals have been and will continue to be of great interest to physicists, chemists, materials scientists, and device engineers in modern industry.
Reflecting the truly interdisciplinary nature of the field that the series covers, the volumes in Semiconductors and Semimetals have been and will continue to be of great interest to physicists, chemists, materials scientists, and device engineers in modern industry.
Applied physicists, electrical engineers, and materials scientists in both academia and industry.
- Edition: 1
- Volume: 63
- Published: October 15, 1999
- Imprint: Academic Press
- No. of pages: 307
- Language: English
- Paperback ISBN: 9780124014930
- eBook ISBN: 9780080864617
RW
R. K. Willardson
Affiliations and expertise
WILLARDSON CONSULTING SPOKANE, WASHINGTONSH
Shin M. Hwa Li
Robert M. Miller, Ph.D., CCC-SLP, BC-NCD, is chief of Audiology and Speech Pathology at the Veterans' Administration Medical Center, Seattle, Washington. He holds the position of clinical associate professor in the departments of Rehabilitation Medicine; Speech and Hearing Sciences; and Otolaryngology, Head, and Neck Surgery at the University of Washington, Seattle. A nationally recognized expert on management of swallowing disorders, Dr. Miller has authored numerous chapters and articles on the topic. He is co-author of the book Medical Speech Pathology. He is Board Certified by the Academy of Neurologic Communication Disorders and Sciences.
Affiliations and expertise
SGS-Thompson Microelectronics, Inc., Phoenix, Arizona, U.S.A.RM
Robert M. Miller
Robert M. Miller, Ph.D., CCC-SLP, BC-NCD, is chief of Audiology and Speech Pathology at the Veterans' Administration Medical Center, Seattle, Washington. He holds the position of clinical associate professor in the departments of Rehabilitation Medicine; Speech and Hearing Sciences; and Otolaryngology, Head, and Neck Surgery at the University of Washington, Seattle. A nationally recognized expert on management of swallowing disorders, Dr. Miller has authored numerous chapters and articles on the topic. He is co-author of the book Medical Speech Pathology. He is Board Certified by the Academy of Neurologic Communication Disorders and Sciences.
Affiliations and expertise
Chief of Audiology and Speech Pathology at the Veterans’ Administration Medical CenterEW
Eicke R. Weber
Affiliations and expertise
Fraunhofer-Institut für Solare Energiesysteme ISE, Freiburg, GermanyRead Chemical Mechanical Polishing in Silicon Processing on ScienceDirect