Three-Dimensional Microfabrication Using Two-Photon Polymerization

1: Laser Direct Writing for Additive Micro-Manufacturing

• Chapter 1.1: Laser-Based Micro–Additive Manufacturing Technologies
  • Abstract
  • 1. Beyond Photolithography: Direct-Write Microfabrication
  • 2. Introduction to Nonlithographic Microfabrication Techniques
  • 3. Laser-Based Microfabrication
  • 4. Laser-Based Additive Microfabrication
  • 5. 2D Microfabrication by LIFT
  • 6. 3D Microfabrication by LIFT
  • 7. Parallelizing the LIFT Process
  • 8. Summary
  • Acknowledgments
• Chapter 1.2: Microstereolithography
  • Abstract
  • 1. Introduction
  • 2. Rapid Prototyping and Stereolithography
  • 3. Improving Stereolithography Resolution
  • 4. Microstereolithography Techniques Based on a Scanning Principle
  • 5. Microstereolithography Techniques Based on a Projection Principle
  • 6. Microstereolithography Processes Having a Submicrometer Resolution
  • 7. Microfabrication with Microstereolithography
  • 8. Conclusions
• Chapter 1.3: Fundamentals of Two-Photon Fabrication
  • Abstract
  • 1. Introduction
  • 2. Nonlinear Absorption
  • 3. Photoresists
  • 4. Direct Fabrication in Other Materials
  • 5. Other Strategies

Chapter 2: Free Radical Photopolymerization of Multifunctional Monomers

• Abstract
• 1. Introduction
• 2. Polymerization Stages and Rate Equations
• 3. Effect of Diffusional Processes on Propagation and Termination Steps
• 4. Effect of Polymerization Conditions on the Polymerization Kinetics
• 5. Effect of Monomer Functionality and Structure
• 6. Concluding Remarks
• Acknowledgment

Chapter 3: Reaction Mechanisms and In Situ Process Diagnostics

• Abstract
• 1. Introduction
• 2. Initiation
• 3. Polymerization
• 4. Conclusions

Chapter 4: Mask-Directed Micro-3D Printing

• Abstract
• 1. Introduction
• 2. Conventional Micro-3D Printing Systems
• 3. Mask-Directed Micro-3D Printing
• 4. Conclusions and Considerations Toward the Future

Chapter 5: Geometric Analysis and Computation Using Layered Depth-Normal Images for Three-Dimensional Microfabrication

• Abstract
• 1. Introduction
• 2. Background and Related Work
• 3. Layered Depth-Normal Images and Related Computational Framework
• 4. Conversion Between LDNIs and Polygonal Meshes
• 5. LDNI-Based Geometric Operations
• 6. Applications in 3D Microfabrication and Others
• 7. Summary and Outlook
• Acknowledgment

Chapter 6: Motion Systems: An Overview of Linear, Air Bearing, and Piezo Stages

• Abstract
• 1. Terminology
• 2. Mechanical Components
• 3. Controller

Chapter 7: Focusing Through High–Numerical Aperture Objective

• Abstract
• 1. Introduction of Diffraction and Optical Imaging
• 2. Focusing Through High-NA Objective: Scalar Optical Fields
• 3. Focusing Through High-NA Objective: Spatially Homogeneously Polarized Optical Fields
• 4. Focusing Through High-NA Objective: Vectorial Optical Fields
• 5. Focus Engineering with Vectorial Optical Fields
• 6. Aberrations and Mitigations
• 7. Discussion and Summary

Chapter 8: Linewidth and Writing Resolution

• Abstract
• 1. Introduction
• 2. Linewidth
• 3. Writing Resolution
• 4. Two-Beam Strategy
• 5. Diffusion-Assisted Approach
• 6. Conclusions

Chapter 9: Making Two-Photon Polymerization Faster

• Abstract
• 1. Motivation for Faster Fabrication
• 2. Typical Speeds of Current Fabrication Methods
• 3. Chemical Methods to Increase Speed
• 4. Physical Methods to Increase Speed
• 5. Engineering Methods to Increase Speed
• 6. The Future of Fast Writing

Chapter 10: Microstructures, Post-TPP Processing

• Abstract
• 1. Introduction
• 2. Chemical Modification of Fabricated Polymer Surfaces
• 3. Double Inversion
• 4. Atomic Layer Deposition
• 5. Electroplating Template
• 6. Pyrolysis
• 7. Multiphoton-induced Spatially Resolved Functionalization
• 8. Conclusions

Chapter 11: A Collection of Microsculptures

• Abstract

12: Applications

• Chapter 12.1: 3D Micro-Optics Via Ultrafast Laser Writing: Miniaturization, Integration, and Multifunctionalities
  • Abstract
  • 1. Introduction
  • 2. Optical Materials
  • 3. Micro-Optical Elements and Components
  • 4. Toward GRIN Micro-Optics
  • 5. Conclusions
  • Acknowledgments
• Chapter 12.2: Remotely Driven Micromachines Produced by Two-Photon Microfabrication
  • Abstract
  • 1. Introduction
  • 2. Fabrication Processes of Metallized Micromachines
  • 3. Fabrication of Copper-Coated Micromachines
  • 4. Release of Metallized Micromachines by Laser Ablation
  • 5. Optically Driven Metallized Micromachines
  • 6. Magnetically Driven Micromachines
  • 7. Conclusions
• Chapter 12.3: Microfluidics
  • Abstract
  • 1. Introduction
  • 2. Basics of Microfluidics
  • 3. Fabrication of Microfluidic Networks by 2PP
  • 4. Fabrication of Microfluidic Components by 2PP
  • 5. Conclusions
• Chapter 12.4: Cell Motility and Nanolithography
  • Abstract
  • 1. Introduction
  • 2. Experiments and Analysis
  • 3. Summary

13: Challenges and Opportunities

• Chapter 13.1: Fabrication of 3D Micro-Architected/Nano-Architected Materials
  • Abstract
  • 1. Introduction
  • 2. Benefits of Architected Materials
  • 3. Benefits of Micro-Architectures/Nano-Architectures
  • 4. Modeling and Design Tools
  • 5. Established Fabrication Approaches
  • 6. Fabrication of Micro-Architected/Nano-Architected Materials with Two-Photon Polymerization Techniques: Challenges and Opportunities
  • 7. Conclusions
• Chapter 13.2: Two-Photon Polymerization as a Component of Desktop Integrated Manufacturing Platforms
  • Abstract
  • 1. Introduction
  • 2. State of the Art of Maskless Material Patterning
  • 3. Applications with Special Manufacturing Requirements
  • 4. Integrated Photonic DIMPs
• Chapter 13.3: Engineered Microenvironments for Cancer Study
  • Abstract
  • 1. Introduction to the Tumor Microenvironment
  • 2. Tumor Microengineering
  • 3. Cancer Biology Insights
  • 4. Therapeutic Insights
  • 5. Future Perspectives for “Mesoscale” Cancer Studies

Appendix A: Basic Photoshop for Electron Microscopy

Appendix B: Numerical Examples