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Thin Films From Free Atoms and Particles

  • 1st Edition - January 10, 1986
  • Editor: Kenneth Klabunde
  • Language: English
  • eBook ISBN:
    9 7 8 - 0 - 3 2 3 - 1 5 3 4 8 - 5

Thin Films from Free Atoms and Particles is an eight-chapter text that describes the primary reaction modes of atoms or coordination-deficient particles. This book presents first… Read more

Thin Films From Free Atoms and Particles

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Thin Films from Free Atoms and Particles is an eight-chapter text that describes the primary reaction modes of atoms or coordination-deficient particles. This book presents first an introduction to free atoms and particles, followed by a chapter describing the embryonic growth of films, such as dimers, trimers, and other small telomers formed and detected. The next chapters discuss the understanding of discharge processes for forming free atoms and particles. The remaining chapters deal with the technology, techniques, and materials in thin films. Physicists, engineers, materials scientists, and chemists will find this book of great value.