Back to School Savings: Save up to 30% on print books and eBooks. No promo code needed.
Back to School Savings: Save up to 30%
Silicon Integrated Circuits
Advances in Materials and Device Research
1st Edition - April 28, 1981
Editor: Dawon Kahng
eBook ISBN:9781483214771
9 7 8 - 1 - 4 8 3 2 - 1 4 7 7 - 1
Silicon Integrated Circuits, Part B covers the special considerations needed to achieve high-power Si-integrated circuits. The book presents articles about the most important… Read more
Purchase Options
Save 50% on book bundles
Immediately download your ebook while waiting for your print delivery. No promo code is needed.
Silicon Integrated Circuits, Part B covers the special considerations needed to achieve high-power Si-integrated circuits. The book presents articles about the most important operations needed for the high-power circuitry, namely impurity diffusion and oxidation; crystal defects under thermal equilibrium in silicon and the development of high-power device physics; and associated technology. The text also describes the ever-evolving processing technology and the most promising approaches, along with the understanding of processing-related areas of physics and chemistry. Physicists, chemists, and engineers involved in silicon integrated circuits will find the book invaluable.
List of Contributors
Preface
Physics and Chemistry of Impurity Diffusion and Oxidation of Silicon
I. Introduction
II. Theory of Group III and V Impurity Diffusion in Silicon
III. Thermal Oxidation of Silicon
IV. Impurity Diffusion and Defect Growth in Oxidizing Ambients
References
Silicon Power Field Controlled Devices and Integrated Circuits