
Microfabrication for Industrial Applications
- 1st Edition - April 1, 2000
- Imprint: William Andrew
- Author: Regina Luttge
- Language: English
- Hardback ISBN:9 7 8 - 0 - 8 1 5 5 - 1 5 8 2 - 1
- Paperback ISBN:9 7 8 - 0 - 1 2 - 8 1 0 3 6 7 - 8
- eBook ISBN:9 7 8 - 0 - 0 8 - 0 9 4 7 6 2 - 4
- eBook ISBN:9 7 8 - 0 - 8 1 5 5 - 1 9 7 7 - 5
Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concep… Read more

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Request a sales quote- Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments
- Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro
- Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs)
- Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT)
- Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling
Micro & Nano Technologies Series
Preface
Author Biography
Chapter 1. Introduction
1.1 Philosophy of Micro/Nanofabrication
1.2 The Industry–Science Dualism
1.3 Industrial Applications
1.4 Purpose and Organization of this Book
REFERENCES
Chapter 2. Basic Technologies for Microsystems
2.1 Photolithography
2.2 Thin Films
2.3 Silicon Micromachining
2.4 Industrially Established Non-Silicon Processing
2.5 Conclusions
REFERENCES
Chapter 3. Advanced Microfabrication Methods
3.1 LIGA
3.2 Deep Reactive Ion Etching
3.3 Micro-Ceramic Processing
3.4 Speciality Substrates
3.5 Advanced Non-Silicon and Silicon Hybrid Devices
3.6 Planar Lightwave Circuits
3.7 Fabrication Example of an Integrated Optical Device
3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study
3.9 Conclusions
REFERENCES
Chapter 4. Nanotechnology
4.1 Top-Down, Bottom-Up
4.2 Nanomaterials
4.3 Where Are We?
4.4 Where to Go from Here?
REFERENCES
Chapter 5. Micromechanical Transducers
5.1 Application Fields
5.2 Overview of Materials
5.3 Thick and Thin Film Hybrid Materials
5.4 Microactuation
5.5 Packaged Sensors
5.6 Silicon as a Mechanical Material in Resonant Microdevices
5.7 Information Society
5.8 Conclusions
REFERENCES
Chapter 6. Chemical and Biological Sensors at Component and Device Level
6.1 Application Field
6.2 Sensor Principles for the Collection of (Bio)Chemical Information
6.3 Integrated chemFET Device: Case Study of a Semiconductor-Based pH Sensor Development
6.4 Integrated Clinical Diagnostics: A Medical Application for Electrochemical Sensor Arrays
6.5 Conclusions
REFERENCES
Chapter 7. Microfluidic Components, Devices and Integrated Lab-on-a-Chip Systems
7.1 Application Fields
7.2 Microfluidic Components
7.3 Controlled Transport by Diffusion
7.4 Integration for Microfluidic Transport, Sensing and Dispensing
7.5 Lab-on-a-Chip
7.6 Device-to-World Connections: The MATAS Concept
7.7 From the Lab Bench to Industry: Microchip Capillary Electrophoresis
7.8 Conclusions
REFERENCES
Chapter 8. Microfabrication for Novel Products in Drug Delivery: An Example
8.1 Microneedle Research at University of Twente and its Spin-Off
8.2 MNA-4-Insulin: A Brief Evaluation
8.3 Conclusions
REFERENCES
Chapter 9. Reflective Comments and Conclusions
9.1 Environmental Aspects
9.2 Health Aspects of Nanoparticles
9.3 Conclusions
REFERENCES
Index
- Edition: 1
- Published: April 1, 2000
- Imprint: William Andrew
- No. of pages: 600
- Language: English
- Hardback ISBN: 9780815515821
- Paperback ISBN: 9780128103678
- eBook ISBN: 9780080947624
- eBook ISBN: 9780815519775
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