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Laser Annealing Processes in Semiconductor Technology

Theory, Modeling and Applications in Nanoelectronics

  • 1st Edition - April 21, 2021
  • Editors: Fuccio Cristiano, Antonino La Magna
  • Language: English
  • Paperback ISBN:
    9 7 8 - 0 - 1 2 - 8 2 0 2 5 5 - 5
  • eBook ISBN:
    9 7 8 - 0 - 1 2 - 8 2 0 2 5 6 - 2

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser anneal… Read more

Laser Annealing Processes in Semiconductor Technology

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Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.