Ion Implantation

List of Contributors

Foreword

Preface


1 Introduction

I. Characteristics of Ion Implantation

II. Historical Perspective and Scope of Present Volume

III. Ion Implantation—Advantages and Limitations of Technique

IV. Status of Industrial Applications of Ion Implantation

V. Ion-Implantation Equipment and Costs

References


2 Ion Bombardment Effects on Material Composition

I. Introduction

II. Effects of Ion Bombardment

III. Sputtering of Alloys and Compounds

IV. High-Dose Ion Implantation

V. Conclusion

References


3 Implantation Metallurgy—Equilibrium Alloys

I. Introduction

II. General Properties

III. Experimental Characterization

IV. Applications

V. Conclusion

References


4 Implantation Metallurgy—Metastable Alloy Formation

I. Introduction

II. Dilute Alloys—Experimental

III. Concentrated Alloys—Experimental

IV. Compound and Precipitate Formation

V. Mechanisms for Formation of Implanted Layer Structures

VI. Conclusions

References


5 Ion Implantation Studies of Hydrogen in Solids

I. Introduction

II. Fundamental Implantation Parameters

III. Experimental Techniques

IV. Hydrogen Implantation Studies of Metals

V. Semiconductors and Insulators

VI. Applications

References


6 The Application of Ion Implantation to Aqueous Corrosion

I. Introduction to Corrosion

II. Effect of Ion Implantation on Aqueous Corrosion

III. Corrosion Behavior of Amorphous Metals

IV. Use of Ion Implantation in Studies of Corrosion Mechanisms

V. Conclusions and Future Trends

Appendix

References


7 Thermal Oxidation

I. Introduction

II. The Oxidation of Metals

III. The Oxidation of Alloys

IV. Ion Implantation of Metals

V. Observations on Implanted Metals

VI. Practical Applications of Ion Implantation for Oxidation Resistance

References


8 Tribological and Mechanical Properties

I. Introduction

II. Wear Mechanisms

III. Contact Mechanisms During Friction

IV. Ion Implantation and Adhesion

V. Wear

VI. Microhardness

VII. Fatigue

VIII. Industrial Applications of Ion Implantation in Mechanical Property Improvement

References


9 Chemical Properties of Ion Implanted Materials

I. Introduction

II. Analytical Methods for Studying the Chemical Properties of Ion Implanted Materials

III. Radiation Chemistry of Implanted Materials

IV. The Chemical State and the Reactions of Implanted Atoms

V. Applications of Ion Bombarded Materials in Chemistry

References


10 Superconductivity

1. Introduction

II. Disordered Systems

III. Metastable Alloys

IV. Compounds

V. Applications

VI. Conclusions

References


11 Optical Effects of Ion Implantation

I. Introduction

II. Optical Waveguides and Components for Electro-Optics

III. Implantation: Index and Annealing Changes

IV. Optical Properties of Implanted Semiconductors

V. Luminescence: General Considerations

VI. Optical Absorption

VII. Conclusions

References

Index

Contents of Previous Volumes