ROBOTICS & AUTOMATION
Empowering Progress
Up to 25% off Essentials Robotics and Automation titles

The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as… Read more
ROBOTICS & AUTOMATION
Up to 25% off Essentials Robotics and Automation titles
The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
Part II. Section I. Advanced implanter systems. Section II. Subsystems and components. Section III. Process control. Section IV. Ion-solid interactions. Section V. Materials science: silicon. Section VI. Materials science: Alloys and compounds. Section VII. Materials science: silicides. Section VIII. New applications in processing and devices. Author index.
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