
Handbook of Mems for Wireless and Mobile Applications
- 1st Edition - August 31, 2013
- Imprint: Woodhead Publishing
- Editor: Deepak Uttamchandani
- Language: English
- Hardback ISBN:9 7 8 - 0 - 8 5 7 0 9 - 2 7 1 - 7
- eBook ISBN:9 7 8 - 0 - 8 5 7 0 9 - 8 6 1 - 0
The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost:… Read more

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Request a sales quotePart one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.
With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems.
- Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications
- Discusses wireless techniques and applications of wireless MEMS, including biomedical applications
- Describes monitoring structures and the environment with wireless MEMS
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Woodhead Publishing Series in Electronic and Optical Materials
Dedication
Preface
Part I: RF MEMS as an enabling technology for wireless applications
Chapter 1: Overview of RF MEMS technology and applications
Abstract:
1.1 Introduction
1.2 Radio frequency microelectromechanical systems (RF MEMS) operation principle and common realizations
1.3 RF MEMS design challenges
1.4 RF MEMS applications
1.5 Conclusion
1.6 Sources of further information and advice
1.7 Acknowledgements
Chapter 2: Overview of wireless techniques for use with MEMS
Abstract:
2.1 Introduction
2.2 Transport layer issues
2.3 Network layer mobility issues
2.4 Data-link layer
2.5 Physical layer
2.6 The wireless link budget
2.7 Physical layer system design
2.8 Conclusion
Chapter 3: RF MEMS fabrication technologies
Abstract:
3.1 Introduction
3.2 MEMS-based technologies for RF circuits with enhanced quality factor and minimized losses
3.3 Technologies for smart RF MEMS
3.4 Highlights on specific key steps in RF MEMS fabrication
3.5 Towards integrated technology for microsystem implementation
3.6 Emerging technologies in wireless applications
3.7 Conclusion
3.8 Acknowledgements
Chapter 4: RF MEMS passive components for wireless applications
Abstract:
4.1 Introduction
4.2 RF MEMS passive components and their applications
4.3 High-performance passive components enabled by RF MEMS technology
4.4 Complex networks based on RF MEMS passive components
4.5 Conclusion
Chapter 5: RF MEMS phase shifters for wireless applications
Abstract:
5.1 Introduction
5.2 Switched-line phase shifter
5.3 Loaded-line phase shifter
5.4 Reflection-type phase shifter
5.5 Distributed-line phase shifter
5.6 Mixed-architectures and exotic phase shifters
5.7 Towards global manufacturing
5.8 Applications
5.9 Conclusion
Chapter 6: RF MEMS antennas for wireless applications
Abstract:
6.1 Introduction
6.2 RF MEMS antennas
6.3 Reconfigurable feeding networks
6.4 Reconfigurable antennas
6.5 Design considerations
6.6 Conclusion and future trends
6.7 Sources of further information and advice
Chapter 7: RF MEMS-based wireless architectures and front-ends
Abstract:
7.1 Introduction
7.2 Communication standards
7.3 Receivers, transmitters and transceivers: basic architectures
7.4 Conventional component technology
7.5 MEMS-based technology: filters, duplexers, switches, tunable devices and architecture
7.6 Diversity in receivers and transmitters
7.7 Multi-input multi-output (MIMO) systems
7.8 Systems-on-a-chip
7.9 Conclusion
Chapter 8: RF MEMS technology for next-generation wireless communications
Abstract:
8.1 Introduction
8.2 RF MEMS technology
8.3 RF MEMS technology for high-performance passive components
8.4 Technology platform for the fabrication of RF MEMS complex circuits
8.5 Some examples of high-performance devices enabled by the RF MEMS technology
8.6 Conclusion
Chapter 9: Wafer-level packaging technology for RF MEMS
Abstract:
9.1 Introduction
9.2 Wafer -level zero-level packaging for RF MEMSSS
9.3 Electrical effects of the packaging material on the packaged devices
9.4 Packaging with hard cap materials
9.5 Packaging with a polymer cap
9.6 Conclusion
Chapter 10: Reliability of RF MEMS
Abstract:
10.1 Introduction
10.2 Overview of failure mechanisms in RF MEMS
10.3 Charging in RF MEMS
10.4 Analytical modelling
10.5 Electrostatic discharge
10.6 Reliability issues of MEMS packages
10.7 Conclusion
Part II: Wireless techniques and applications of wireless MEMS
Chapter 11: Energy harvesters for powering wireless systems
Abstract:
11.1 Introduction
11.2 Kinetic energy harvesters
11.3 Design of kinetic energy harvesters
11.4 Other typologies of energy harvesters
11.5 Conclusion
11.6 References
11.7 Appendix: list of symbols
Chapter 12: MEMS wireless implantable systems: historical review and perspectives
Abstract:
12.1 Introduction
12.2 Basic considerations and characteristics of wireless MEMS implantable systems
12.3 Significant research on radio frequency implantable systems from 1955 to 1975
12.4 Progress of implantable systems from 1980 to 2010
12.5 Challenges of implantable/attached electronics
12.6 Conclusion and future trends
12.7 Acknowledgements
Chapter 13: Wireless considerations in ocular implants based on microsystems
Abstract:
13.1 Introduction
13.2 Challenges of wireless ocular implants
13.3 Considerations of ocular microsystems
13.4 Applications of wireless microsystems in ocular implants
13.5 Necessary improvements in wireless ocular implants
13.6 Conclusion
Chapter 14: MEMS-based wireless intraocular pressure sensors
Abstract:
14.1 Introduction
14.2 Passive miniature implants for intraocular pressure (IOP) sensing
14.3 Introduction of active MEMS systems for IOP implants
14.4 Flexible parylene platforms for long-term MEMS implants
14.5 Design of custom ultra-low-power autonomous IOP sensors
14.6 Active and passive MEMS contact lenses for IOP monitoring
14.7 Conclusion
Chapter 15: Drug delivery using wireless MEMS
Abstract:
15.1 Introduction
15.2 Wireless power and data for drug delivery applications
15.3 A MEMS approach to drug delivery
15.4 Biological constraints and requirements
15.5 Security concerns for wireless implants
15.6 Wireless inductive powering and uni-directional data system for a MEMS drug pump
15.7 Suggested improvements and future generation device
15.8 Conclusion
15.9 Acknowledgment
Chapter 16: RF MEMS for automotive radar
Abstract:
16.1 Introduction
16.2 RF MEMS components for automotive radar
16.3 Examples of RF MEMS-based automotive radar front-end technology
16.4 Unconventional MEMS radar beam-steering technologies
16.5 Conclusion
Chapter 17: Telecommunications reliability monitoring using wireless MEMS
Abstract:
17.1 Introduction
17.2 Typical reliability issues in telecommunication systems
17.3 Reliability monitoring with wireless MEMS
17.4 Case study: multi-MEMS platform
17.5 Conclusion
17.6 Acknowledgements
Chapter 18: Optical MEMS for displays in portable systems
Abstract:
18.1 Introduction
18.2 MEMS-based direct-view displays
18.3 Handheld picoprojectors
18.4 Automobile head-up display
18.5 Eyewear displays
18.6 Conclusion
Index
- Edition: 1
- Published: August 31, 2013
- Imprint: Woodhead Publishing
- No. of pages: 640
- Language: English
- Hardback ISBN: 9780857092717
- eBook ISBN: 9780857098610
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