Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1
Introduction to Vacuum and Systems
- 1st Edition - October 17, 2024
- Authors: J.R. Gaines, Matthew Healy
- Language: English
- Hardback ISBN:9 7 8 - 0 - 4 4 3 - 3 4 1 8 8 - 5
- eBook ISBN:9 7 8 - 0 - 1 2 - 8 2 3 3 9 3 - 1
Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1: Introduction to Vacuum and Systems details the important practical considerations in des… Read more
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Request a sales quoteFundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1: Introduction to Vacuum and Systems details the important practical considerations in design of vacuum systems for various vacuum deposition technologies. Topics covered include an introduction to vacuum and end-uses, molecular density in vacuum, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas–solid interactions, vacuum pump technology, pressure sensors, leak detection, and the impact of fundamental design decisions and operating practices on vacuum system performance.
The introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach. System design, assembly, maintenance, and trouble-shooting are reviewed in detail.
The book also describes a wide range of pressure measurement approaches, and includes several key characterization techniques, example applications on systems for rough vacuum, high vacuum and ultrahigh vacuum, as well as trade-offs in system design. These perspectives will allow the reader to develop an understanding of all the elements required for a successfully designed, assembled, and operating system.
The introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach. System design, assembly, maintenance, and trouble-shooting are reviewed in detail.
The book also describes a wide range of pressure measurement approaches, and includes several key characterization techniques, example applications on systems for rough vacuum, high vacuum and ultrahigh vacuum, as well as trade-offs in system design. These perspectives will allow the reader to develop an understanding of all the elements required for a successfully designed, assembled, and operating system.
- Covers vacuum pump technology, taking a system from atmosphere down to high or ultra-high vacuum
- Discusses the fundamental descriptions of vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach
- Provides an overview of practical vacuum system operating techniques that will ensure optimal performance and troubleshooting methods to identify system deficiencies
Materials Scientists, Engineers, Mechanical Engineers in academia and R & D, and industrial technologists
- Title of Book
- Cover image
- Title page
- Table of Contents
- Vacuum and Thin-Film Deposition Technologies
- Copyright
- About the authors
- Acknowledgments
- Chapter One. 2500years of vacuum science and technology
- Introduction: What we mean by vacuum and vacuum science
- Vacuum and vacuum science
- Historical highlights in vacuum science and technology: Concept to hardware
- The (artificial) vacuum environment in vacuum chambers
- Producing, or creating, vacuum: Development of vacuum pumps
- Quantifying vacuum: The development of vacuum gauges
- Commercialization of vacuum systems: The evolution of artificial lighting
- Modern vacuum systems
- An industry develops around applications of vacuum: Understanding the vacuum market
- Size and growth potential of the vacuum industry
- A top-down approach
- Simplistic model for the size of the vacuum equipment industry
- A bottoms-up approach: Demand for individual vacuum components
- Cyclical nature of demand for equipment in the vacuum industry
- Regional distribution of the vacuum industry
- Market drivers and jobs in the vacuum equipment industry
- Summary
- Chapter Two. Understanding pressure and vacuum
- Introduction
- Physical states of matter
- Solids
- Liquids
- Gases
- Gases within solids and liquids
- The fundamental or founding gas laws
- Pascal (1623–62)
- Boyle (1627–91)
- Amontons (1663–1705)
- Charles (1746–1823)
- Avogadro (1776–1856)
- Dalton (1766–1844) and Dalton's law
- Graham and Graham's law
- The ideal gas law: Combining Boyle, Charles, Amonton, and Avogadro
- Gas pressure
- The kinetic molecular theory of gases
- Gases that may be present in “air”
- The partial pressures of gases
- Equilibrium vapor pressure
- Molecular velocity
- Mean free path
- Molecular density and pressure
- The viscosity of gases
- Gas flow and friction
- How heat transfer changes based on pressure
- Thermal transfer in vacuum
- Convection and conduction
- Accommodation and the accommodation coefficient
- Thermal radiation
- Diffusion and effusion
- Scales for quantifying pressure measurement
- Summary
- Chapter Three. Overview of vacuum systems
- What is a vacuum system?
- Open-cycle vacuum systems
- Closed-cycle vacuum systems
- Design of a basic vacuum system
- The range of pressures in vacuum
- The application of vacuum in science and industry
- Vacuum ranges in practice
- Rough vacuum, atmosphere to 10−1 Torr
- Medium vacuum, from 10−1 to about 10−3 Torr
- High vacuum, from 10−3 to 10−8 Torr
- Ultrahigh vacuum—Pressures below 10−8 Torr
- Extreme high vacuum, pressures below 7.5×10−13 Torr
- Achieving vacuum with pumps
- Selecting a vacuum pressure for processing
- The many benefits of vacuum
- What is air and how do you get rid of it?
- What good is vacuum?
- Vacuum for insulation or isolation
- Vacuum-insulated windows
- Vacuum as electrical insulation
- Vacuum as a barrier to friction
- Vacuum for sound or acoustic insulation
- Vacuum for chemical processing
- Vacuum distillation and rectification
- Vacuum-induced surface chemical modifications
- Vacuum-enabled combustion suppression
- Lifting and manipulation
- Vacuum for separation
- Vacuum as a conduit for radiation
- Summary
- Chapter Four. Examples of vacuum systems
- The relationship between vacuum pressure and system cost
- Sputtering: An example of pressure versus cost
- Degasing and drying systems
- A note on traps and vapor condensers
- Sterilization enabled by vacuum
- Low-pressure hydrogen peroxide
- Electron beam sterilization systems
- Hot pressing and heat treatment of metals
- Heat treatment of materials
- Molten metal casting
- Vacuum refinement of metals
- Refinement by electron beam melting
- Vacuum distillation of metals
- Crystal growth systems
- Thermal calibration standards: Triple points of materials
- Vacuum-enabled thin-film deposition
- Thermal and Electron—Beam evaporation systems
- Sputtering
- Pulsed laser deposition
- Atomic layer deposition
- Chemical vapor deposition
- A note on pressure control
- Molecular beam epitaxy
- Small, solid-state, vacuum systems
- Large format industrial coating systems
- Semiconductor fabrication systems
- Coating systems for telescope mirrors
- Particle accelerators
- Fusion reactors
- Additive manufacturing
- Systems to simulate the conditions of outer space
- Summary
- Chapter Five. The movement of gases in vacuum systems
- Introduction
- The flow of molecules in vacuum
- Quantifying flow
- Mean free path
- Flow regimes in vacuum
- The Knudsen Number
- The viscous flow regime
- Subsets of viscous flow, viscous–laminar and viscous–turbulent
- Viscous–laminar flow
- Distinguishing between viscous–laminar and viscous–turbulent flow
- Transitional flow (∼1 to ∼10–3mbar)
- Molecular or random flow is below 10–3mbar
- Molecules desorbing from solid surfaces
- Surface finish effects and gas/solid interactions
- Dwell times of gases on solids
- Conductance in vacuum systems
- Derivation of effective pumping speed or EPS
- Conductance of a tube in vacuum
- Conductance as an estimate of flow
- Conductance changes with pressure
- Summing a series of flow restrictions
- Determining effective pumping speed
- Using look-up tables to estimate transmission probabilities
- Systems that are combinations of transmission probabilities
- The practical side of conductance and transmission probability
- The smallest conductance dominates
- Best achievable base pressure
- Pump-down times
- Water and pump-down times
- How to size a vacuum pump for a specific time-to-pressure
- Test cases using a vacuum science training system
- Tests to determine fundamental health of a vacuum system
- Characterization of a vacuum system using our VTS
- Best (ultimate) base pressure
- Impact of additional, unnecessary, conductance
- Rate of rise test
- Effective pumping speed calculation
- Effect of contamination on best base pressure
- Compact system design
- Summary
- Chapter Six. Understanding unwanted gases in vacuum systems
- Types of gas/solid or gas/surface interactions
- Physical adsorption or physisorption
- Diffusion
- Backscattering
- Initial atmosphere in a chamber
- Cleanliness and vacuum hygiene
- Leaks, real and virtual
- Real leaks
- Virtual leaks
- Outgassing or off-gassing
- Desorption versus degassing
- Outgassing rates of materials used in vacuum
- Measuring outgassing rates
- Throughput method
- Rate-of-rise pressure or gas accumulation
- Mass or weight loss
- Backstreaming from pumps
- Tests for backstreaming
- Backstreaming mitigation
- Permeation of gases into vacuum systems
- Permeation of gases through metals
- Permeation of gases through glass
- Permeation of gases through O-rings
- Diffusion of gases through barriers
- Interesting side note: The filtering effect of permeation, diffusion, and ionic conductivity
- Vaporization of liquids or solids inside a vacuum system
- The unique interactions of water with solid surfaces
- Metal surfaces used in vacuum
- The structure of H2O at the water/solid interface
- The effect of water on pump-down times
- Estimating the vapor pressure and evaporation rates of solid water
- Atmospheric gases and contamination trapped in water/solid interfaces
- The saturation limits of water on metal or metal oxide surfaces
- Relative humidity
- Breaking the bonds of the water/solid interface
- Closing thoughts on water
- Summary
- Symbols used in vacuum system design
- Symbols used for vacuum pumps
- Symbols for vacuum chambers
- Symbols for specific vacuum components
- Valves or isolation devices, for vacuum service
- Vacuum valves with specific actuation mechanisms
- Flanges, connectors, and feedthroughs
- Pressure measurement symbols
- Fundamentals of Vacuum Science Glossary
- Index
- No. of pages: 550
- Language: English
- Edition: 1
- Published: October 17, 2024
- Imprint: Elsevier
- Hardback ISBN: 9780443341885
- eBook ISBN: 9780128233931
JG
J.R. Gaines
J.R. Gaines is the Technical Director of Education for the Kurt J. Lesker Company, Jefferson Hills PA, United States. He has more than 40 years of experience in the research, development, and commercialization of advanced materials technologies including superconductivity, semiconductors, cryogenics, space simulation, energy generation, and energy conversion and storage. His experience includes vacuum systems, thin-film deposition, inorganic chemistry, nanotechnology, and advanced ceramic processing. He currently develops and delivers Lesker’s many educational programs through Lesker University teaching events.
Affiliations and expertise
Technical Director of Education, Kurt J. Lesker Company, Jefferson Hills, PA, USAMH
Matthew Healy
Matt Healy is Business Segment Manager at Kurt J. Lesker Company, Jefferson Hills PA, United States, specializing in materials processing and applications. He has a PhD in Chemistry from Harvard University, a BS in Chemistry from the Massachusetts Institute of Technology, and an MBA from University of Chicago Graduate School of Business. He began his research career as a post-doctoral scientist at the Department of Energy’s Los Alamos National Laboratory. He was formerly Vice President of Product Management at Pixelligent Technologies, LLC and previously Director of Business Development of Digital Lumens and GE Lighting Division, and Product Line Director at ATMI.
Affiliations and expertise
Business Segment Manager, Kurt J. Lesker Company, USARead Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1 on ScienceDirect