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Advanced CMOS Process Technology
1st Edition - March 28, 1989
Author: J Pimbley
9 7 8 - 0 - 3 2 3 - 1 5 6 8 0 - 6
Advanced CMOS Process Technology is part of the VLSI Electronics Microstructure Science series. The main topic of this book is complementary metal-oxide semiconductor or CMOS… Read more
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Advanced CMOS Process Technology is part of the VLSI Electronics Microstructure Science series. The main topic of this book is complementary metal-oxide semiconductor or CMOS technology, which plays a significant part in the electronics systems. The topics covered in this book range from metallization, isolation techniques, reliability, and yield. The volume begins with an introductory chapter that discusses the microelectronics revolution of the 20th century. Then Chapter 2 puts focus on the CMOS devices and circuit background, discussing CMOS capacitors and field effect transistors. Metallization topics and concepts are covered in Chapter 3, while isolation techniques are tackled in Chapter 4. Long-term reliability of CMOS is the topic covered in Chapter 5. Finally, the ability of semiconductor technology to yield circuits is discussed in Chapter 6. The book is particularly addressed to engineers, scientists, and technical managers.
Chapter 1 Introduction
Chapter 2 CMOS Device and Circuit Background
I. Junction Diode
II. Metal-Oxide-Semiconductor Capacitor
III. Metal-Oxide-Semiconductor Field Effect Transistor
IV. Circuit Considerations
V. CMOS Latch-up
Chapter 3 Metallization
I. Gate Electrodes
II. Reduction in Device Parasitics
IV. An Application of Advanced Metallization Technology