Advanced CMOS Process Technology
- 1st Edition - March 28, 1989
- Imprint: Academic Press
- Author: J Pimbley
- Language: English
- Paperback ISBN:9 7 8 - 0 - 1 2 - 4 3 3 3 6 8 - 0
- eBook ISBN:9 7 8 - 0 - 3 2 3 - 1 5 6 8 0 - 6
Advanced CMOS Process Technology is part of the VLSI Electronics Microstructure Science series. The main topic of this book is complementary metal-oxide semiconductor or CMOS… Read more
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Request a sales quoteAdvanced CMOS Process Technology is part of the VLSI Electronics Microstructure Science series. The main topic of this book is complementary metal-oxide semiconductor or CMOS technology, which plays a significant part in the electronics systems. The topics covered in this book range from metallization, isolation techniques, reliability, and yield. The volume begins with an introductory chapter that discusses the microelectronics revolution of the 20th century. Then Chapter 2 puts focus on the CMOS devices and circuit background, discussing CMOS capacitors and field effect transistors. Metallization topics and concepts are covered in Chapter 3, while isolation techniques are tackled in Chapter 4. Long-term reliability of CMOS is the topic covered in Chapter 5. Finally, the ability of semiconductor technology to yield circuits is discussed in Chapter 6. The book is particularly addressed to engineers, scientists, and technical managers.
Preface
Chapter 1 Introduction
Chapter 2 CMOS Device and Circuit Background
I. Junction Diode
II. Metal-Oxide-Semiconductor Capacitor
III. Metal-Oxide-Semiconductor Field Effect Transistor
IV. Circuit Considerations
V. CMOS Latch-up
References
Chapter 3 Metallization
I. Gate Electrodes
II. Reduction in Device Parasitics
III. Interconnections
IV. An Application of Advanced Metallization Technology
V. Summary
References
Chapter 4 Isolation Techniques
I. Introduction
II. Device Isolation
III. Well Isolation
IV. Dielectric Isolation
References
Chapter 5 Reliability
I. Channel Hot Electron Degradation
II. Electromigration
III. Oxide Wear-out
References
Chapter 6 Yield
I. Yield Basics
II. Sources and Classification of Yield Loss
III. Yield Enhancement Methodology
References
Index
- Edition: 1
- Published: March 28, 1989
- Imprint: Academic Press
- No. of pages: 304
- Language: English
- Paperback ISBN: 9780124333680
- eBook ISBN: 9780323156806
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