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Stimulated Deposition Processes and Materials Aspects of Ion Beam Synthesis

  • 1st Edition
  • Editors: H. Freller, J.M. Martínez-Duart, J. Dieleman, J.A. Kilner, P.L.F. Hemment, Yves Pauleau
  • Language: English

This volume contains the proceedings of Symposium C: Ion Beam, Plasma, Laser, and Thermally-Stimulated Deposition Processes and Symposium G: Material Aspects of Ion Beam Synthesis:… Read more

Stimulated Deposition Processes and Materials Aspects of Ion Beam Synthesis

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This volume contains the proceedings of Symposium C: Ion Beam, Plasma, Laser, and Thermally-Stimulated Deposition Processes and Symposium G: Material Aspects of Ion Beam Synthesis: Phase Formation and Modification of the E-MRS 1993 Spring conference.

Symposium C covers recent trends in the field of deposition processes stimulated by low energy particle beams and shows the wide range of materials which can be modified advantageously by energetic ion and photon bombardment. Topics covered include: sputter-deposition processes; low energy ion-assisted deposition processes and thermally-activitated CVD processes; ion beam-assisted deposition and laser beam-induced modifications of materials.

Symposium G brought together scientists and engineers working in similar fields to stimulate further investigations not only of SIMOX but of other materials systems and applications. The topics covered include: recent developments in the science and technology of silicide formation; mechanisms responsible for secondary defect formation in SIMOX materials; the formation and role of synthesised altered layers during surface analysis.